Particle-enhanced near-field optical effect and laser writing for nanostructure fabrication

Y. F. Lu, L. Zhang, W. D. Song, Y. W. Zheng, B. S. Luk'yanchuk

Research output: Contribution to journalConference article

4 Scopus citations

Abstract

In this paper, we present a novel method of nanostucture fabrication using particle-enhanced near-field optical effect and lasers. For this purpose, spherical silica particles were deposited on a silicon surface. After laser illumination, hillocks with size of about 150 nm were obtained at the original position of the particles. The mechanism can be explained as the enhancement of light intensity near the contact area. Since the characteristic distance between particles and substrate is smaller than the radiation wavelength and the particle size is of the order of a wavelength, particle does not simply play the role of microfocusing lens as in far-field, but possess optical resonance effect in near-field. In our work, the light intensity on the surface under the spherical particle was calculated by solving the electromagnetic boundary problem "particle on suface".

Original languageEnglish (US)
Pages (from-to)143-145
Number of pages3
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4426
DOIs
StatePublished - Jan 1 2002
EventSecond International Symposium on Laser Precision Microfabrication - Singapore, Singapore
Duration: May 16 2001May 18 2001

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Keywords

  • Laser irradiation
  • Nanostructure
  • Near-field
  • Optical resonance
  • Silica particles

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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