Parametric investigation of laser nanoimprinting of hemispherical cavity arrays

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, X. Y. Chen

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

A monolayer of self-assembled silica particles can be imprinted into a silicon substrate by laser irradiation (KrF excimer laser, λ=248 nm). Periodical hemispherical cavities can be therefore created on the substrate surface. The influences of various particle sizes and laser fluence were investigated. In addition, preheating of the substrate significantly improves the performance. One-dimensional thermal calculation was employed to understand the thermal effect in this process. Three-dimensional optical simulation provided an accurate insight into the light intensity enhancement. Raman spectroscopy was used to examine the stress induced by the laser imprinting process resided in the cavity structures.

Original languageEnglish (US)
Pages (from-to)5144-5151
Number of pages8
JournalJournal of Applied Physics
Volume96
Issue number9
DOIs
StatePublished - Nov 1 2004

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cavities
lasers
excimer lasers
luminous intensity
temperature effects
fluence
Raman spectroscopy
silicon dioxide
irradiation
heating
augmentation
silicon
simulation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Parametric investigation of laser nanoimprinting of hemispherical cavity arrays. / Li, L. P.; Lu, Y. F.; Doerr, D. W.; Alexander, D. R.; Chen, X. Y.

In: Journal of Applied Physics, Vol. 96, No. 9, 01.11.2004, p. 5144-5151.

Research output: Contribution to journalArticle

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