Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications

John A. Woollam, Blaine D. Johs, Craig M. Herzinger, James N. Hilfiker, Ron A. Synowicki, Corey L. Bungay

Research output: Contribution to journalConference article

144 Citations (Scopus)

Abstract

Variable angle spectroscopic ellipsometry (VASE) is important for metrology in several industries, and is a powerful technique for research on new materials and processes. Sophisticated instrumentation and software for VASE data acquisition and analysis is available for the most demanding research applications, while simple to use software enables the use of VASE for routine measurements as well. This article gives a basic introduction to the theory of ellipsometry, references "classic" papers, and shows typical VASE applications. In the following companion paper, more advanced applications are discussed.

Original languageEnglish (US)
Article number1029402
Pages (from-to)3-28
Number of pages26
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume10294
DOIs
StatePublished - Jul 19 1999
EventOptical Metrology: A Critical Review 1999 - Denver, United States
Duration: Jul 18 1999Jul 23 1999

Fingerprint

Spectroscopic Ellipsometry
Spectroscopic ellipsometry
ellipsometry
Angle
Ellipsometry
Software
computer programs
Metrology
Instrumentation
Data Acquisition
Data acquisition
Data analysis
metrology
data acquisition
Industry
industries

Keywords

  • Ellipsometry
  • metrology
  • optical properties
  • spectroscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Overview of variable-angle spectroscopic ellipsometry (VASE) : I. Basic theory and typical applications. / Woollam, John A.; Johs, Blaine D.; Herzinger, Craig M.; Hilfiker, James N.; Synowicki, Ron A.; Bungay, Corey L.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 10294, 1029402, 19.07.1999, p. 3-28.

Research output: Contribution to journalConference article

Woollam, John A. ; Johs, Blaine D. ; Herzinger, Craig M. ; Hilfiker, James N. ; Synowicki, Ron A. ; Bungay, Corey L. / Overview of variable-angle spectroscopic ellipsometry (VASE) : I. Basic theory and typical applications. In: Proceedings of SPIE - The International Society for Optical Engineering. 1999 ; Vol. 10294. pp. 3-28.
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