Optical properties of siox nanostructured films by pulsed-laser deposition

X. Y. Chen, Y. F. Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

SiOx nanostructured films were formed by pulsed-laser deposition (PLD) of Si. The photoluminescence band at 1.6- 2.1 eV shifts with ambient gas pressure, substrate temperature and post-deposition processing, which supports the quantum confinement effect theory.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2005
PublisherOptical Society of America
ISBN (Print)1557527709, 9781557527707
StatePublished - Jan 1 2005
EventConference on Lasers and Electro-Optics, CLEO 2005 - Baltimore, MD, United States
Duration: May 22 2005May 22 2005

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceConference on Lasers and Electro-Optics, CLEO 2005
CountryUnited States
CityBaltimore, MD
Period5/22/055/22/05

Fingerprint

Quantum confinement
Pulsed laser deposition
pulsed laser deposition
gas pressure
Photoluminescence
Optical properties
photoluminescence
optical properties
shift
Substrates
Processing
Gases
Temperature
temperature

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Chen, X. Y., & Lu, Y. F. (2005). Optical properties of siox nanostructured films by pulsed-laser deposition. In Conference on Lasers and Electro-Optics, CLEO 2005 (Optics InfoBase Conference Papers). Optical Society of America.

Optical properties of siox nanostructured films by pulsed-laser deposition. / Chen, X. Y.; Lu, Y. F.

Conference on Lasers and Electro-Optics, CLEO 2005. Optical Society of America, 2005. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chen, XY & Lu, YF 2005, Optical properties of siox nanostructured films by pulsed-laser deposition. in Conference on Lasers and Electro-Optics, CLEO 2005. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics, CLEO 2005, Baltimore, MD, United States, 5/22/05.
Chen XY, Lu YF. Optical properties of siox nanostructured films by pulsed-laser deposition. In Conference on Lasers and Electro-Optics, CLEO 2005. Optical Society of America. 2005. (Optics InfoBase Conference Papers).
Chen, X. Y. ; Lu, Y. F. / Optical properties of siox nanostructured films by pulsed-laser deposition. Conference on Lasers and Electro-Optics, CLEO 2005. Optical Society of America, 2005. (Optics InfoBase Conference Papers).
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