Optical properties of RuO2 films deposited by reactive sputtering

A. Belkind, Z. Orban, J. L. Vossen, J. A. Woollam

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

Ruthenium dioxide, RuO2, belongs to the family of transition metal compounds of the platinum group and has unique environmental stability. Owing to its combination of extreme physical and chemical properties, RuO2 films are of great academic and practical interest. RuO2 films were deposited by d.c. reactive sputtering in an in-line sputtering system on a dynamic substrate. The resistivity and optical properties of the films were investigated. The optical and dielectric constants of RuO2 films were determined using spectroscopic ellipsometry and spectrophotometry.

Original languageEnglish (US)
Pages (from-to)242-247
Number of pages6
JournalThin Solid Films
Volume207
Issue number1-2
DOIs
StatePublished - Jan 30 1992

Fingerprint

Reactive sputtering
Optical properties
sputtering
optical properties
Transition metal compounds
Platinum Compounds
Optical constants
Spectroscopic ellipsometry
metal compounds
Spectrophotometry
spectrophotometry
Ruthenium
dioxides
chemical properties
Chemical properties
ruthenium
ellipsometry
Sputtering
Platinum
platinum

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Optical properties of RuO2 films deposited by reactive sputtering. / Belkind, A.; Orban, Z.; Vossen, J. L.; Woollam, J. A.

In: Thin Solid Films, Vol. 207, No. 1-2, 30.01.1992, p. 242-247.

Research output: Contribution to journalArticle

Belkind, A. ; Orban, Z. ; Vossen, J. L. ; Woollam, J. A. / Optical properties of RuO2 films deposited by reactive sputtering. In: Thin Solid Films. 1992 ; Vol. 207, No. 1-2. pp. 242-247.
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