Optical properties of "diamondlike" carbon films

An ellipsometric study

A. Azim Khan, David Mathine, John A Woollam, Y. Chung

Research output: Contribution to journalArticle

43 Citations (Scopus)

Abstract

The index of refraction and extinction coefficient are measured as a function of wavelength from 254 to 633 nm using reflection-null ellipsometry. It is shown that both rf glow-discharge-deposited and ion-beam-sputtered films have the same values of n and k over the measured wavelength range. Calculated values of absorption coefficient indicate that the absorption edge is not reached even at near ultraviolet wavelengths. Thermal cycling up to 500°C does not change the optical properties significantly.

Original languageEnglish (US)
Pages (from-to)7229-7235
Number of pages7
JournalPhysical Review B
Volume28
Issue number12
DOIs
StatePublished - Jan 1 1983

Fingerprint

Carbon films
Optical properties
optical properties
Wavelength
carbon
wavelengths
Ellipsometry
Glow discharges
Thermal cycling
Refraction
glow discharges
Ion beams
ellipsometry
refraction
absorptivity
extinction
ion beams
cycles
coefficients

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Optical properties of "diamondlike" carbon films : An ellipsometric study. / Khan, A. Azim; Mathine, David; Woollam, John A; Chung, Y.

In: Physical Review B, Vol. 28, No. 12, 01.01.1983, p. 7229-7235.

Research output: Contribution to journalArticle

Khan, A. Azim ; Mathine, David ; Woollam, John A ; Chung, Y. / Optical properties of "diamondlike" carbon films : An ellipsometric study. In: Physical Review B. 1983 ; Vol. 28, No. 12. pp. 7229-7235.
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