Optical properties of "diamondlike" carbon films: An ellipsometric study

A. Azim Khan, David Mathine, John A. Woollam, Y. Chung

Research output: Contribution to journalArticle

43 Scopus citations

Abstract

The index of refraction and extinction coefficient are measured as a function of wavelength from 254 to 633 nm using reflection-null ellipsometry. It is shown that both rf glow-discharge-deposited and ion-beam-sputtered films have the same values of n and k over the measured wavelength range. Calculated values of absorption coefficient indicate that the absorption edge is not reached even at near ultraviolet wavelengths. Thermal cycling up to 500°C does not change the optical properties significantly.

Original languageEnglish (US)
Pages (from-to)7229-7235
Number of pages7
JournalPhysical Review B
Volume28
Issue number12
DOIs
Publication statusPublished - Jan 1 1983

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ASJC Scopus subject areas

  • Condensed Matter Physics

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