Optical properties of cobalt slanted columnar thin films passivated by atomic layer deposition

Daniel Schmidt, Eva Schubert, Mathias Schubert

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

Optical properties of passivated metal slanted columnar thin films from cobalt within the visible spectral region are reported. Glancing angle deposition is utilized to grow slanted nanocolumns which have been conformally coated with Al 2O 3 by a subsequent atomic layer deposition process. A generalized anisotropic Bruggeman effective medium approximation has been employed to analyze spectroscopic generalized ellipsometry data. The modified homogenization approach allows for determination of biaxial (monoclinic) optical and structural properties as well as fractions of three film constituents. The conformal alumina passivation layer preserves the pristine metal character of the nanostructures and prevents oxidation and aging effects.

Original languageEnglish (US)
Article number011912
JournalApplied Physics Letters
Volume100
Issue number1
DOIs
StatePublished - Jan 2 2012

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atomic layer epitaxy
cobalt
optical properties
thin films
homogenizing
metals
passivity
ellipsometry
aluminum oxides
oxidation
approximation

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Optical properties of cobalt slanted columnar thin films passivated by atomic layer deposition. / Schmidt, Daniel; Schubert, Eva; Schubert, Mathias.

In: Applied Physics Letters, Vol. 100, No. 1, 011912, 02.01.2012.

Research output: Contribution to journalArticle

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