Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry

Mathias Schubert, E. Franke, H. Neumann, T. E. Tiwald, D. W. Thompson, John A Woollam, J. Hahn

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We focus on the application of infrared spectroscopic ellipsometry (IRSE) to simultaneously determine phase and microstructure of mixed-phase thin films such as polymorphic-polycrystalline boron nitride (BN) thin films deposited by magnetron sputtering on (100) silicon. We discuss a recently presented microstructure-dependent model for infrared optical properties of mixed-phase thin films which contain anisotropic materials. In particular, the IRSE data are sensitive to the pure or mixed hexagonal (h) and cubic (c) BN thin film layer structure, phase composition and average grain c-axis distribution of the hexagonal phase.

Original languageEnglish (US)
Pages (from-to)692-696
Number of pages5
JournalThin Solid Films
Volume313-314
DOIs
StatePublished - Feb 13 1998

Fingerprint

Spectroscopic ellipsometry
Boron nitride
boron nitrides
ellipsometry
Infrared radiation
Thin films
thin films
microstructure
Microstructure
Silicon
Phase composition
Magnetron sputtering
magnetron sputtering
Optical properties
optical properties
boron nitride
silicon

Keywords

  • Anisotropy
  • Effective medium theory
  • Infrared ellipsometry
  • Mixed-phase thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry. / Schubert, Mathias; Franke, E.; Neumann, H.; Tiwald, T. E.; Thompson, D. W.; Woollam, John A; Hahn, J.

In: Thin Solid Films, Vol. 313-314, 13.02.1998, p. 692-696.

Research output: Contribution to journalArticle

Schubert, Mathias ; Franke, E. ; Neumann, H. ; Tiwald, T. E. ; Thompson, D. W. ; Woollam, John A ; Hahn, J. / Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry. In: Thin Solid Films. 1998 ; Vol. 313-314. pp. 692-696.
@article{fbf384363290432b86a8df607303544a,
title = "Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry",
abstract = "We focus on the application of infrared spectroscopic ellipsometry (IRSE) to simultaneously determine phase and microstructure of mixed-phase thin films such as polymorphic-polycrystalline boron nitride (BN) thin films deposited by magnetron sputtering on (100) silicon. We discuss a recently presented microstructure-dependent model for infrared optical properties of mixed-phase thin films which contain anisotropic materials. In particular, the IRSE data are sensitive to the pure or mixed hexagonal (h) and cubic (c) BN thin film layer structure, phase composition and average grain c-axis distribution of the hexagonal phase.",
keywords = "Anisotropy, Effective medium theory, Infrared ellipsometry, Mixed-phase thin films",
author = "Mathias Schubert and E. Franke and H. Neumann and Tiwald, {T. E.} and Thompson, {D. W.} and Woollam, {John A} and J. Hahn",
year = "1998",
month = "2",
day = "13",
doi = "10.1016/S0040-6090(97)00979-6",
language = "English (US)",
volume = "313-314",
pages = "692--696",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",

}

TY - JOUR

T1 - Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry

AU - Schubert, Mathias

AU - Franke, E.

AU - Neumann, H.

AU - Tiwald, T. E.

AU - Thompson, D. W.

AU - Woollam, John A

AU - Hahn, J.

PY - 1998/2/13

Y1 - 1998/2/13

N2 - We focus on the application of infrared spectroscopic ellipsometry (IRSE) to simultaneously determine phase and microstructure of mixed-phase thin films such as polymorphic-polycrystalline boron nitride (BN) thin films deposited by magnetron sputtering on (100) silicon. We discuss a recently presented microstructure-dependent model for infrared optical properties of mixed-phase thin films which contain anisotropic materials. In particular, the IRSE data are sensitive to the pure or mixed hexagonal (h) and cubic (c) BN thin film layer structure, phase composition and average grain c-axis distribution of the hexagonal phase.

AB - We focus on the application of infrared spectroscopic ellipsometry (IRSE) to simultaneously determine phase and microstructure of mixed-phase thin films such as polymorphic-polycrystalline boron nitride (BN) thin films deposited by magnetron sputtering on (100) silicon. We discuss a recently presented microstructure-dependent model for infrared optical properties of mixed-phase thin films which contain anisotropic materials. In particular, the IRSE data are sensitive to the pure or mixed hexagonal (h) and cubic (c) BN thin film layer structure, phase composition and average grain c-axis distribution of the hexagonal phase.

KW - Anisotropy

KW - Effective medium theory

KW - Infrared ellipsometry

KW - Mixed-phase thin films

UR - http://www.scopus.com/inward/record.url?scp=0031998637&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031998637&partnerID=8YFLogxK

U2 - 10.1016/S0040-6090(97)00979-6

DO - 10.1016/S0040-6090(97)00979-6

M3 - Article

VL - 313-314

SP - 692

EP - 696

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -