Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films

Jiri Olejnicek, Zdenek Hubicka, Michal Kohout, Petra Ksirova, Michaela Brunclikova, Stepan Kment, Martin Cada, Scott A Darveau, Chris Exstrom

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

CuIn1-xGaxSe2 (CIGS) thin films with x = 0, 0.28 and 1 were prepared by the sputtering of Cu, In and Ga in HiPIMS (High Power Impulse Magnetron Sputtering) or DC magnetron and subsequently selenized in an Ar+Se atmosphere. Optical emission spectroscopy (OES) was used to monitor differences in HiPIMS and DC plasma during sputtering of metallic precursors. Thin film characteristics were measured using X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, energy-dispersive X-ray spectroscopy (EDX) and other techniques.

Original languageEnglish (US)
Title of host publication2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1666-1669
Number of pages4
ISBN (Electronic)9781479943982
DOIs
StatePublished - Oct 15 2014
Event40th IEEE Photovoltaic Specialist Conference, PVSC 2014 - Denver, United States
Duration: Jun 8 2014Jun 13 2014

Publication series

Name2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014

Other

Other40th IEEE Photovoltaic Specialist Conference, PVSC 2014
CountryUnited States
CityDenver
Period6/8/146/13/14

Fingerprint

Optical emission spectroscopy
Magnetron sputtering
Sputtering
Thin films
Raman spectroscopy
Plasmas
X ray diffraction
Scanning electron microscopy
X-Ray Emission Spectrometry

Keywords

  • CIGS
  • HiPIMS
  • emission spectroscopy
  • magnetron sputtering
  • thin films

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Olejnicek, J., Hubicka, Z., Kohout, M., Ksirova, P., Brunclikova, M., Kment, S., ... Exstrom, C. (2014). Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films. In 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014 (pp. 1666-1669). [6925239] (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2014.6925239

Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films. / Olejnicek, Jiri; Hubicka, Zdenek; Kohout, Michal; Ksirova, Petra; Brunclikova, Michaela; Kment, Stepan; Cada, Martin; Darveau, Scott A; Exstrom, Chris.

2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1666-1669 6925239 (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Olejnicek, J, Hubicka, Z, Kohout, M, Ksirova, P, Brunclikova, M, Kment, S, Cada, M, Darveau, SA & Exstrom, C 2014, Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films. in 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014., 6925239, 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014, Institute of Electrical and Electronics Engineers Inc., pp. 1666-1669, 40th IEEE Photovoltaic Specialist Conference, PVSC 2014, Denver, United States, 6/8/14. https://doi.org/10.1109/PVSC.2014.6925239
Olejnicek J, Hubicka Z, Kohout M, Ksirova P, Brunclikova M, Kment S et al. Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films. In 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 1666-1669. 6925239. (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014). https://doi.org/10.1109/PVSC.2014.6925239
Olejnicek, Jiri ; Hubicka, Zdenek ; Kohout, Michal ; Ksirova, Petra ; Brunclikova, Michaela ; Kment, Stepan ; Cada, Martin ; Darveau, Scott A ; Exstrom, Chris. / Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films. 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 1666-1669 (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).
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