Optical constants of crystalline WO3 deposited by magnetron sputtering

Michael J. DeVries, Chris Trimble, Thomas E. Tiwald, Daniel W. Thompson, John A. Woollam, Jeffrey S. Hale

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

Crystalline WO3-x is an infrared (IR) electrochromic material having possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H+ or Li+. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ ellipsometric data are used to characterize both the deposition process and the optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsometer are combined with data from a mid-infrared Fourier-transform-infrared-based ellipsometer to provide optical constants over a spectral range of 0.031-6.1 eV.

Original languageEnglish (US)
Pages (from-to)2906-2910
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume17
Issue number5
DOIs
StatePublished - Jan 1 1999

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Optical constants
Magnetron sputtering
magnetron sputtering
Crystalline materials
Infrared radiation
ellipsometers
Intercalation
intercalation
Fourier transforms
switches
Switches
Satellites
Ions
ions

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Optical constants of crystalline WO3 deposited by magnetron sputtering. / DeVries, Michael J.; Trimble, Chris; Tiwald, Thomas E.; Thompson, Daniel W.; Woollam, John A.; Hale, Jeffrey S.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 17, No. 5, 01.01.1999, p. 2906-2910.

Research output: Contribution to journalArticle

DeVries, Michael J. ; Trimble, Chris ; Tiwald, Thomas E. ; Thompson, Daniel W. ; Woollam, John A. ; Hale, Jeffrey S. / Optical constants of crystalline WO3 deposited by magnetron sputtering. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 1999 ; Vol. 17, No. 5. pp. 2906-2910.
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