Optical characterization and modeling of amorphous hydrogenated carbon films

William A. McGahan, John A Woollam

Research output: Contribution to journalConference article

12 Citations (Scopus)

Abstract

Amorphous hydrogenated carbon (a-C:H) thin films are of great importance in a number of industrial applications due to their hardness, chemical stability, and optical transparency. In many applications, the thickness of the a-C:H film and/or its optical properties are critical for the performance of the complete structure, and, as a result, a means of measuring these quantities is important. In this work we review the use of spectroscopic ellipsometry and transmission measurements for the estimation of the thickness and optical constants of thin a-C:H films. Spectra are shown for films exhibiting Tauc effective bandgaps ranging from 0 - 2.3 eV. The films were prepared by magnetron sputtering and plasma CVD on both silicon and glass substrates. The general energy dependence of the a-C:H optical constants is discussed in terms of the absorption processes which occur in the film.

Original languageEnglish (US)
Pages (from-to)453-464
Number of pages12
JournalMaterials Research Society Symposium - Proceedings
Volume349
StatePublished - Dec 1 1994
EventProceedings of the 1994 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 4 1994Apr 8 1994

Fingerprint

Carbon films
carbon
Optical constants
Plasma CVD
Spectroscopic ellipsometry
Chemical stability
Silicon
Magnetron sputtering
Transparency
Industrial applications
ellipsometry
magnetron sputtering
Energy gap
Carbon
hardness
Optical properties
Hardness
vapor deposition
optical properties
Glass

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Optical characterization and modeling of amorphous hydrogenated carbon films. / McGahan, William A.; Woollam, John A.

In: Materials Research Society Symposium - Proceedings, Vol. 349, 01.12.1994, p. 453-464.

Research output: Contribution to journalConference article

@article{02bf20e90eed43d3bdb091c6dc9b1820,
title = "Optical characterization and modeling of amorphous hydrogenated carbon films",
abstract = "Amorphous hydrogenated carbon (a-C:H) thin films are of great importance in a number of industrial applications due to their hardness, chemical stability, and optical transparency. In many applications, the thickness of the a-C:H film and/or its optical properties are critical for the performance of the complete structure, and, as a result, a means of measuring these quantities is important. In this work we review the use of spectroscopic ellipsometry and transmission measurements for the estimation of the thickness and optical constants of thin a-C:H films. Spectra are shown for films exhibiting Tauc effective bandgaps ranging from 0 - 2.3 eV. The films were prepared by magnetron sputtering and plasma CVD on both silicon and glass substrates. The general energy dependence of the a-C:H optical constants is discussed in terms of the absorption processes which occur in the film.",
author = "McGahan, {William A.} and Woollam, {John A}",
year = "1994",
month = "12",
day = "1",
language = "English (US)",
volume = "349",
pages = "453--464",
journal = "Materials Research Society Symposium - Proceedings",
issn = "0272-9172",
publisher = "Materials Research Society",

}

TY - JOUR

T1 - Optical characterization and modeling of amorphous hydrogenated carbon films

AU - McGahan, William A.

AU - Woollam, John A

PY - 1994/12/1

Y1 - 1994/12/1

N2 - Amorphous hydrogenated carbon (a-C:H) thin films are of great importance in a number of industrial applications due to their hardness, chemical stability, and optical transparency. In many applications, the thickness of the a-C:H film and/or its optical properties are critical for the performance of the complete structure, and, as a result, a means of measuring these quantities is important. In this work we review the use of spectroscopic ellipsometry and transmission measurements for the estimation of the thickness and optical constants of thin a-C:H films. Spectra are shown for films exhibiting Tauc effective bandgaps ranging from 0 - 2.3 eV. The films were prepared by magnetron sputtering and plasma CVD on both silicon and glass substrates. The general energy dependence of the a-C:H optical constants is discussed in terms of the absorption processes which occur in the film.

AB - Amorphous hydrogenated carbon (a-C:H) thin films are of great importance in a number of industrial applications due to their hardness, chemical stability, and optical transparency. In many applications, the thickness of the a-C:H film and/or its optical properties are critical for the performance of the complete structure, and, as a result, a means of measuring these quantities is important. In this work we review the use of spectroscopic ellipsometry and transmission measurements for the estimation of the thickness and optical constants of thin a-C:H films. Spectra are shown for films exhibiting Tauc effective bandgaps ranging from 0 - 2.3 eV. The films were prepared by magnetron sputtering and plasma CVD on both silicon and glass substrates. The general energy dependence of the a-C:H optical constants is discussed in terms of the absorption processes which occur in the film.

UR - http://www.scopus.com/inward/record.url?scp=0028731054&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028731054&partnerID=8YFLogxK

M3 - Conference article

VL - 349

SP - 453

EP - 464

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

ER -