Optical and interfacial electronic properties of diamond-like carbon films

John A. Woollam, V. Natarajan, Joel Lamb, A. Azim Khan, George Bu-Abbud, David Mathine, Dan Rubin, Rodney O. Dillon, Bruce Banks, John Pouch, Daniel A. Gulino, Stan Domitz, David C. Liu, David Ingram

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We have been preparing hard semitransparent carbon films on oriented polished crystal wafers of silicon, indium phosphide and gallium arsenide, as well as on KBr and quartz. Properties of the films were determined using IR and visible absorption spectroscopy, ellipsometry, conductance-capacitance spectroscopy and α particle-proton recoil spectroscopy. Preparation techniques include r.f. plasma decomposition of methane (and other hydrocarbons), ion beam sputtering and dual-ion-beam sputter deposition. Optical energy band gaps as large as 2.7 eV and extinction coefficients lower than 0.1 at long wavelengths are found. Electronic state densities at the interface with silicon as low as 1010 states eV-1 cm-2 were found.

Original languageEnglish (US)
Pages (from-to)121-126
Number of pages6
JournalThin Solid Films
Volume119
Issue number1
DOIs
StatePublished - Sep 7 1984

Fingerprint

Diamond like carbon films
Silicon
Electronic properties
Ion beams
diamonds
ion beams
Spectroscopy
Indium phosphide
recoil protons
indium phosphides
Sputter deposition
Quartz
Gallium arsenide
carbon
Carbon films
Methane
Ellipsometry
Electronic states
silicon
Hydrocarbons

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Woollam, J. A., Natarajan, V., Lamb, J., Khan, A. A., Bu-Abbud, G., Mathine, D., ... Ingram, D. (1984). Optical and interfacial electronic properties of diamond-like carbon films. Thin Solid Films, 119(1), 121-126. https://doi.org/10.1016/0040-6090(84)90164-0

Optical and interfacial electronic properties of diamond-like carbon films. / Woollam, John A.; Natarajan, V.; Lamb, Joel; Khan, A. Azim; Bu-Abbud, George; Mathine, David; Rubin, Dan; Dillon, Rodney O.; Banks, Bruce; Pouch, John; Gulino, Daniel A.; Domitz, Stan; Liu, David C.; Ingram, David.

In: Thin Solid Films, Vol. 119, No. 1, 07.09.1984, p. 121-126.

Research output: Contribution to journalArticle

Woollam, JA, Natarajan, V, Lamb, J, Khan, AA, Bu-Abbud, G, Mathine, D, Rubin, D, Dillon, RO, Banks, B, Pouch, J, Gulino, DA, Domitz, S, Liu, DC & Ingram, D 1984, 'Optical and interfacial electronic properties of diamond-like carbon films', Thin Solid Films, vol. 119, no. 1, pp. 121-126. https://doi.org/10.1016/0040-6090(84)90164-0
Woollam, John A. ; Natarajan, V. ; Lamb, Joel ; Khan, A. Azim ; Bu-Abbud, George ; Mathine, David ; Rubin, Dan ; Dillon, Rodney O. ; Banks, Bruce ; Pouch, John ; Gulino, Daniel A. ; Domitz, Stan ; Liu, David C. ; Ingram, David. / Optical and interfacial electronic properties of diamond-like carbon films. In: Thin Solid Films. 1984 ; Vol. 119, No. 1. pp. 121-126.
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