NVESD microfactory: A new approach to Infrared Focal Plane Array manufacturing

J. H. Dinan, J. D. Benson, A. B. Cornfeld, M. Martinka, J. N. Johnson, J. Bratton, P. Taylor, B. Johs, P. He, S. Pittal, John A. Woollam

Research output: Contribution to conferencePaper

2 Citations (Scopus)

Abstract

A novel approach to Infrared Focal Plane Array fabrication is being investigated at the US Army Night Vision & Electronics Sensors Directorate. The goal is a demonstration of the feasibility of carrying out all epitaxial growth and device processing steps without removing a wafer from the protective environment of a multi-chamber vacuum system.

Original languageEnglish (US)
Pages205-211
Number of pages7
StatePublished - Dec 1 1996
EventProceedings of the 1996 IEEE/CPMT 19th International Electronics Manufacturing Technology Symposium - Austin, TX, USA
Duration: Oct 14 1996Oct 16 1996

Other

OtherProceedings of the 1996 IEEE/CPMT 19th International Electronics Manufacturing Technology Symposium
CityAustin, TX, USA
Period10/14/9610/16/96

Fingerprint

Focal plane arrays
Epitaxial growth
Electronic equipment
Demonstrations
Vacuum
Infrared radiation
Fabrication
Sensors
Processing

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

Dinan, J. H., Benson, J. D., Cornfeld, A. B., Martinka, M., Johnson, J. N., Bratton, J., ... Woollam, J. A. (1996). NVESD microfactory: A new approach to Infrared Focal Plane Array manufacturing. 205-211. Paper presented at Proceedings of the 1996 IEEE/CPMT 19th International Electronics Manufacturing Technology Symposium, Austin, TX, USA, .

NVESD microfactory : A new approach to Infrared Focal Plane Array manufacturing. / Dinan, J. H.; Benson, J. D.; Cornfeld, A. B.; Martinka, M.; Johnson, J. N.; Bratton, J.; Taylor, P.; Johs, B.; He, P.; Pittal, S.; Woollam, John A.

1996. 205-211 Paper presented at Proceedings of the 1996 IEEE/CPMT 19th International Electronics Manufacturing Technology Symposium, Austin, TX, USA, .

Research output: Contribution to conferencePaper

Dinan, JH, Benson, JD, Cornfeld, AB, Martinka, M, Johnson, JN, Bratton, J, Taylor, P, Johs, B, He, P, Pittal, S & Woollam, JA 1996, 'NVESD microfactory: A new approach to Infrared Focal Plane Array manufacturing', Paper presented at Proceedings of the 1996 IEEE/CPMT 19th International Electronics Manufacturing Technology Symposium, Austin, TX, USA, 10/14/96 - 10/16/96 pp. 205-211.
Dinan JH, Benson JD, Cornfeld AB, Martinka M, Johnson JN, Bratton J et al. NVESD microfactory: A new approach to Infrared Focal Plane Array manufacturing. 1996. Paper presented at Proceedings of the 1996 IEEE/CPMT 19th International Electronics Manufacturing Technology Symposium, Austin, TX, USA, .
Dinan, J. H. ; Benson, J. D. ; Cornfeld, A. B. ; Martinka, M. ; Johnson, J. N. ; Bratton, J. ; Taylor, P. ; Johs, B. ; He, P. ; Pittal, S. ; Woollam, John A. / NVESD microfactory : A new approach to Infrared Focal Plane Array manufacturing. Paper presented at Proceedings of the 1996 IEEE/CPMT 19th International Electronics Manufacturing Technology Symposium, Austin, TX, USA, .7 p.
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