Abstract
Diamond-like carbon (DLC) coated tips have been successfully applied in field emitter arrays, and scanning probe microscope (SPM) based nanofabrications. DLC deposition on tips is conventionally realized by thermal and plasma-enhanced chemical vapor deposition processes. In this study, we use laser-assisted method employing strongly enhanced near field around the tip apex for DLC deposition. DLC films were deposited on tungsten (W) tips under KrF excimer laser irradiation in a benzene solution and in a laser chemical vapor deposition (LCVD) chamber. Simulation results showed a highly localized optical field enhancement at the tip apex. There was also an optical-field gradient from apex to tip body. Experiment results showed that a locally confined DLC film was deposited based on energy dispersive X-ray (EDX) analysis. Raman spectra showed that at positions close to apexes, films tend to be more diamond-like. This implies that quality of DLC film varies according to local optical intensity along the tip. Hence, the deposition process was confirmed to be induced by the local near field generated by laser and nanotip interaction.
| Original language | English (US) |
|---|---|
| Article number | 66 |
| Pages (from-to) | 464-470 |
| Number of pages | 7 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5713 |
| DOIs | |
| State | Published - Aug 22 2005 |
| Event | Photon Processing in Microelectronics and Photonics IV - San Jose, CA, United States Duration: Jan 24 2005 → Jan 27 2005 |
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Keywords
- DLC
- Laser-assisted deposition
- Near field
- Tip
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
Near-field enhanced laser-assisted deposition. / Shi, J.; Lu, Y. F.; Chen, X. Y.; Cherukuri, R. S.; Mendu, K. K.; Batta, N.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5713, 66, 22.08.2005, p. 464-470.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - Near-field enhanced laser-assisted deposition
AU - Shi, J.
AU - Lu, Y. F.
AU - Chen, X. Y.
AU - Cherukuri, R. S.
AU - Mendu, K. K.
AU - Batta, N.
PY - 2005/8/22
Y1 - 2005/8/22
N2 - Diamond-like carbon (DLC) coated tips have been successfully applied in field emitter arrays, and scanning probe microscope (SPM) based nanofabrications. DLC deposition on tips is conventionally realized by thermal and plasma-enhanced chemical vapor deposition processes. In this study, we use laser-assisted method employing strongly enhanced near field around the tip apex for DLC deposition. DLC films were deposited on tungsten (W) tips under KrF excimer laser irradiation in a benzene solution and in a laser chemical vapor deposition (LCVD) chamber. Simulation results showed a highly localized optical field enhancement at the tip apex. There was also an optical-field gradient from apex to tip body. Experiment results showed that a locally confined DLC film was deposited based on energy dispersive X-ray (EDX) analysis. Raman spectra showed that at positions close to apexes, films tend to be more diamond-like. This implies that quality of DLC film varies according to local optical intensity along the tip. Hence, the deposition process was confirmed to be induced by the local near field generated by laser and nanotip interaction.
AB - Diamond-like carbon (DLC) coated tips have been successfully applied in field emitter arrays, and scanning probe microscope (SPM) based nanofabrications. DLC deposition on tips is conventionally realized by thermal and plasma-enhanced chemical vapor deposition processes. In this study, we use laser-assisted method employing strongly enhanced near field around the tip apex for DLC deposition. DLC films were deposited on tungsten (W) tips under KrF excimer laser irradiation in a benzene solution and in a laser chemical vapor deposition (LCVD) chamber. Simulation results showed a highly localized optical field enhancement at the tip apex. There was also an optical-field gradient from apex to tip body. Experiment results showed that a locally confined DLC film was deposited based on energy dispersive X-ray (EDX) analysis. Raman spectra showed that at positions close to apexes, films tend to be more diamond-like. This implies that quality of DLC film varies according to local optical intensity along the tip. Hence, the deposition process was confirmed to be induced by the local near field generated by laser and nanotip interaction.
KW - DLC
KW - Laser-assisted deposition
KW - Near field
KW - Tip
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UR - http://www.scopus.com/inward/citedby.url?scp=23744487071&partnerID=8YFLogxK
U2 - 10.1117/12.591120
DO - 10.1117/12.591120
M3 - Conference article
AN - SCOPUS:23744487071
VL - 5713
SP - 464
EP - 470
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
M1 - 66
ER -