Nanostructure fabrication using pulsed lasers and near-field optical properties of sub-micron particles

L. Zhang, Y. F. Lu, W. D. Song, Y. W. Zheng, B. S. Luk'yanchuk

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

Recently, the field of nanoelectronics has evolved into a major area of investigation. In this paper, we present a novel method of nanofabrication using pulsed lasers and near-field optical properties of sub-micron particles. For this purpose, spherical silica particles were deposited on a silicon surface. After laser illumination, hillocks with size of about 150 nm were obtained at the original position of the particles. The mechanism can be explained as the enhancement of light intensity near the contact area. Since the characteristic distance between particles and substrate is smaller than the radiation wavelength and the particle size is of the order of a wavelength, particle does not simply play the role of microfocusing lens as in far-field, but possess optical resonance effect in near-field. In our work, the light intensity on the surface under the spherical particle was calculated by solving the electromagnetic boundary problem "particle on surface".

Original languageEnglish (US)
Pages (from-to)Y4.3.1-Y4.3.5
JournalMaterials Research Society Symposium - Proceedings
Volume676
Publication statusPublished - Dec 1 2001
EventSynthesis, Functional Properties and Applications of Nanostructures - San Francisco, CA, United States
Duration: Apr 17 2001Apr 20 2001

    Fingerprint

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this