Nanofabrication and nanocharacterization using near-field optics

Kaijun Yi, Yongfeng Lu

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

In this chapter, techniques and platforms to fabricate and characterize nanostructures using optical approaches based on tip-enhanced near-eld effects are introduced. The background of these techniques is reviewed. The details of a nano-Raman spectrometer and imaging system developed for characterizing materials and devices at nanoscales and a laser-assisted scanning tunneling microscope (LASTM) developed for performing surface nanostructuring are presented. Both the nano-Raman spectrometer and LASTM processes feature spatial resolutions of 30 nm, much beyond the optical diffraction limit.

Original languageEnglish (US)
Title of host publicationIntelligent Energy Field Manufacturing
Subtitle of host publicationInterdisciplinary Process Innovations
PublisherCRC Press
Pages377-400
Number of pages24
ISBN (Electronic)9781420071030
ISBN (Print)9781420071016
DOIs
Publication statusPublished - Jan 1 2010

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ASJC Scopus subject areas

  • Engineering(all)
  • Energy(all)

Cite this

Yi, K., & Lu, Y. (2010). Nanofabrication and nanocharacterization using near-field optics. In Intelligent Energy Field Manufacturing: Interdisciplinary Process Innovations (pp. 377-400). CRC Press. https://doi.org/10.1201/EBK1420071016