Nano-robot enabled characterizations of local electrical properties for nano-structures

Hongzhi Chen, Ning Xi, Bo Song, Ruiguo Yang, King W.C. Lai, Liangliang Chen, Chengeng Qu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Local electrical characterization has wide spectrum of applications in various areas. However, there are a number of difficulties that hinder the precise measurement of local electrical properties of samples, particularly those within nano-scale spatial resolution. Inspired by these challenges, we developed a nano-robot enabled electrical characterization system that can be utilized to pinpoint the local electrical properties of materials, devices, and bioentities with high spatial and electrical resolution. This system consists of an electrical characterization unit and a nano-robot with an augment reality system, which was developed from a traditional atomic force microscopy (AFM). The augment reality system provides real-time visual feedback. The real-time visual display integrated with the real-time force feedback from the nano-robot allows a precise control of the position and force of the AFM tips towards samples, which are significant for the sensitivity of local electrical measurement. The system design and implementation are presented in the paper. Experiments were carried out to study the local conductance of a multi-wall carbon nanotube (MWCNT), demonstrating the effectiveness of this system.

Original languageEnglish (US)
Title of host publication2012 12th IEEE International Conference on Nanotechnology, NANO 2012
DOIs
Publication statusPublished - Nov 22 2012
Event2012 12th IEEE International Conference on Nanotechnology, NANO 2012 - Birmingham, United Kingdom
Duration: Aug 20 2012Aug 23 2012

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380

Other

Other2012 12th IEEE International Conference on Nanotechnology, NANO 2012
CountryUnited Kingdom
CityBirmingham
Period8/20/128/23/12

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Keywords

  • Atomic Force Microscopy (AFM)
  • Augmented Reality
  • Electrical Characterization
  • Nano-robot

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

Cite this

Chen, H., Xi, N., Song, B., Yang, R., Lai, K. W. C., Chen, L., & Qu, C. (2012). Nano-robot enabled characterizations of local electrical properties for nano-structures. In 2012 12th IEEE International Conference on Nanotechnology, NANO 2012 [6322154] (Proceedings of the IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2012.6322154