Nano electro-machining (nano-EM): A novel method for sculpting nano vias (< 20 nm) for nanoscale packaging

Ajay P. Malshe, Kumar R. Virwani, Valliappa Kalyanasundaram, Kamlakar P. Rajurkar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

There is a great need to produce nanoscale features on diverse and sometimes difficult-to-machine materials for electronic and bio-medical applications. This paper describes an electro-machining (EM) process at nanoscale, implemented using a scanning probe platinum-iridium (Pt-Ir) electrode tool (15-20 nm radius) in dielectric oil. The experiments were conducted by maintaining a gap of 2 nm between the tool and the work-piece. These experiments have successfully demonstrated that controlled and consistent machined features, as small as 10 nm in diameter, on atomically flat gold can be obtained. It is suggested that resonant tunnelling through dielectric oil molecules causes the removal of material.

Original languageEnglish (US)
Title of host publicationProceedings - 2008 International Symposium on Microelectronics, IMAPS 2008
Pages527-532
Number of pages6
Publication statusPublished - Dec 1 2008
Event41st Annual International Symposium on Microelectronics, IMAPS 2008 - Providence, RI, United States
Duration: Nov 2 2008Nov 6 2008

Publication series

NameProceedings - 2008 International Symposium on Microelectronics, IMAPS 2008

Conference

Conference41st Annual International Symposium on Microelectronics, IMAPS 2008
CountryUnited States
CityProvidence, RI
Period11/2/0811/6/08

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Keywords

  • Electrical discharge machining
  • Nanoscale
  • Scanning tunneling microscope

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Malshe, A. P., Virwani, K. R., Kalyanasundaram, V., & Rajurkar, K. P. (2008). Nano electro-machining (nano-EM): A novel method for sculpting nano vias (< 20 nm) for nanoscale packaging. In Proceedings - 2008 International Symposium on Microelectronics, IMAPS 2008 (pp. 527-532). (Proceedings - 2008 International Symposium on Microelectronics, IMAPS 2008).