Multilayer processing of high-Tc films and stacked bicrystal Josephson junctions

H. Q. Li, R. H. Ono, D. A. Rudman, L. R. Vale, Sy-Hwang Liou

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A new process for making high-temperature superconducting multilayer circuits is reported in detail. Proximity exposure was used to form controllable shallow edges which are required for the crossovers and interconnects. Small features with shallow edges can be achieved by the combination of contact exposure and proximity exposure. Stacked Josephson junctions on STO bicrystal substrates were prepared using this process and tested. A multilayer low-inductance dc-SQUID fabricated using this process shows large voltage modulation. Published by Elsevier Science Ltd.

Original languageEnglish (US)
Pages (from-to)711-717
Number of pages7
JournalApplied Superconductivity
Volume6
Issue number10-12
DOIs
StatePublished - Jan 1 1999

Fingerprint

Bicrystals
bicrystals
Josephson junctions
Multilayers
proximity
SQUIDs
Processing
Inductance
Modulation
inductance
Networks (circuits)
crossovers
Electric potential
Substrates
modulation
electric potential
Temperature

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Multilayer processing of high-Tc films and stacked bicrystal Josephson junctions. / Li, H. Q.; Ono, R. H.; Rudman, D. A.; Vale, L. R.; Liou, Sy-Hwang.

In: Applied Superconductivity, Vol. 6, No. 10-12, 01.01.1999, p. 711-717.

Research output: Contribution to journalArticle

Li, H. Q. ; Ono, R. H. ; Rudman, D. A. ; Vale, L. R. ; Liou, Sy-Hwang. / Multilayer processing of high-Tc films and stacked bicrystal Josephson junctions. In: Applied Superconductivity. 1999 ; Vol. 6, No. 10-12. pp. 711-717.
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