Micro and nano machining by electro-physical and chemical processes

K. P. Rajurkar, G. Levy, A. Malshe, M. M. Sundaram, J. McGeough, X. Hu, R. Resnick, A. DeSilva

Research output: Contribution to journalArticle

269 Scopus citations


The need for micro-features, components and products is rapidly increasing in diverse industries such as electronics, medical and aviation. Product miniaturization demands innovative manufacturing methods. Various existing macro-manufacturing processes are being modified to perform micro-scale manufacturing. Electro-physical and chemical micromachining processes play important role in this field due to their special material removal mechanisms. This paper reports the worldwide technical developments and state-of-the-art of electro-physical and chemical micromachining processes. Issues related to the supporting technologies such as standardization, metrology and equipment design are briefly assessed. Non-technological issues including environmental effects and education are also discussed.

Original languageEnglish (US)
Pages (from-to)643-666
Number of pages24
JournalCIRP Annals - Manufacturing Technology
Issue number2
StatePublished - Jan 1 2006



  • Micromachining
  • Nano fabrication

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Rajurkar, K. P., Levy, G., Malshe, A., Sundaram, M. M., McGeough, J., Hu, X., Resnick, R., & DeSilva, A. (2006). Micro and nano machining by electro-physical and chemical processes. CIRP Annals - Manufacturing Technology, 55(2), 643-666. https://doi.org/10.1016/j.cirp.2006.10.002