Micro and nano machining by electro-physical and chemical processes

K. P. Rajurkar, G. Levy, A. Malshe, M. M. Sundaram, J. McGeough, X. Hu, R. Resnick, A. DeSilva

Research output: Contribution to journalArticle

252 Citations (Scopus)

Abstract

The need for micro-features, components and products is rapidly increasing in diverse industries such as electronics, medical and aviation. Product miniaturization demands innovative manufacturing methods. Various existing macro-manufacturing processes are being modified to perform micro-scale manufacturing. Electro-physical and chemical micromachining processes play important role in this field due to their special material removal mechanisms. This paper reports the worldwide technical developments and state-of-the-art of electro-physical and chemical micromachining processes. Issues related to the supporting technologies such as standardization, metrology and equipment design are briefly assessed. Non-technological issues including environmental effects and education are also discussed.

Original languageEnglish (US)
Pages (from-to)643-666
Number of pages24
JournalCIRP Annals - Manufacturing Technology
Volume55
Issue number2
DOIs
StatePublished - Jan 1 2006

Fingerprint

Machining
Micromachining
Electronic medical equipment
Standardization
Aviation
Environmental impact
Macros
Education
Industry

Keywords

  • Micromachining
  • Nano fabrication

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Micro and nano machining by electro-physical and chemical processes. / Rajurkar, K. P.; Levy, G.; Malshe, A.; Sundaram, M. M.; McGeough, J.; Hu, X.; Resnick, R.; DeSilva, A.

In: CIRP Annals - Manufacturing Technology, Vol. 55, No. 2, 01.01.2006, p. 643-666.

Research output: Contribution to journalArticle

Rajurkar, KP, Levy, G, Malshe, A, Sundaram, MM, McGeough, J, Hu, X, Resnick, R & DeSilva, A 2006, 'Micro and nano machining by electro-physical and chemical processes', CIRP Annals - Manufacturing Technology, vol. 55, no. 2, pp. 643-666. https://doi.org/10.1016/j.cirp.2006.10.002
Rajurkar, K. P. ; Levy, G. ; Malshe, A. ; Sundaram, M. M. ; McGeough, J. ; Hu, X. ; Resnick, R. ; DeSilva, A. / Micro and nano machining by electro-physical and chemical processes. In: CIRP Annals - Manufacturing Technology. 2006 ; Vol. 55, No. 2. pp. 643-666.
@article{48ce0b777f754cd4bd21175160a9cb21,
title = "Micro and nano machining by electro-physical and chemical processes",
abstract = "The need for micro-features, components and products is rapidly increasing in diverse industries such as electronics, medical and aviation. Product miniaturization demands innovative manufacturing methods. Various existing macro-manufacturing processes are being modified to perform micro-scale manufacturing. Electro-physical and chemical micromachining processes play important role in this field due to their special material removal mechanisms. This paper reports the worldwide technical developments and state-of-the-art of electro-physical and chemical micromachining processes. Issues related to the supporting technologies such as standardization, metrology and equipment design are briefly assessed. Non-technological issues including environmental effects and education are also discussed.",
keywords = "Micromachining, Nano fabrication",
author = "Rajurkar, {K. P.} and G. Levy and A. Malshe and Sundaram, {M. M.} and J. McGeough and X. Hu and R. Resnick and A. DeSilva",
year = "2006",
month = "1",
day = "1",
doi = "10.1016/j.cirp.2006.10.002",
language = "English (US)",
volume = "55",
pages = "643--666",
journal = "CIRP Annals - Manufacturing Technology",
issn = "0007-8506",
publisher = "Elsevier USA",
number = "2",

}

TY - JOUR

T1 - Micro and nano machining by electro-physical and chemical processes

AU - Rajurkar, K. P.

AU - Levy, G.

AU - Malshe, A.

AU - Sundaram, M. M.

AU - McGeough, J.

AU - Hu, X.

AU - Resnick, R.

AU - DeSilva, A.

PY - 2006/1/1

Y1 - 2006/1/1

N2 - The need for micro-features, components and products is rapidly increasing in diverse industries such as electronics, medical and aviation. Product miniaturization demands innovative manufacturing methods. Various existing macro-manufacturing processes are being modified to perform micro-scale manufacturing. Electro-physical and chemical micromachining processes play important role in this field due to their special material removal mechanisms. This paper reports the worldwide technical developments and state-of-the-art of electro-physical and chemical micromachining processes. Issues related to the supporting technologies such as standardization, metrology and equipment design are briefly assessed. Non-technological issues including environmental effects and education are also discussed.

AB - The need for micro-features, components and products is rapidly increasing in diverse industries such as electronics, medical and aviation. Product miniaturization demands innovative manufacturing methods. Various existing macro-manufacturing processes are being modified to perform micro-scale manufacturing. Electro-physical and chemical micromachining processes play important role in this field due to their special material removal mechanisms. This paper reports the worldwide technical developments and state-of-the-art of electro-physical and chemical micromachining processes. Issues related to the supporting technologies such as standardization, metrology and equipment design are briefly assessed. Non-technological issues including environmental effects and education are also discussed.

KW - Micromachining

KW - Nano fabrication

UR - http://www.scopus.com/inward/record.url?scp=72949118506&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=72949118506&partnerID=8YFLogxK

U2 - 10.1016/j.cirp.2006.10.002

DO - 10.1016/j.cirp.2006.10.002

M3 - Article

AN - SCOPUS:72949118506

VL - 55

SP - 643

EP - 666

JO - CIRP Annals - Manufacturing Technology

JF - CIRP Annals - Manufacturing Technology

SN - 0007-8506

IS - 2

ER -