MEMS torsion oscillator magnetic field sensor

Xiaolu Yin, Qianqian Jiao, Lu Yuan, Sy-Hwang Liou

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe77.5Si7.5B15 wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.

Original languageEnglish (US)
Article number6559313
Pages (from-to)3890-3892
Number of pages3
JournalIEEE Transactions on Magnetics
Volume49
Issue number7
DOIs
StatePublished - Aug 5 2013

Fingerprint

Torsional stress
MEMS
Magnetic fields
Sensors
Magnetometers
Torque
Wire

Keywords

  • MEMS
  • Magnetic field sensor
  • torsion oscillator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

MEMS torsion oscillator magnetic field sensor. / Yin, Xiaolu; Jiao, Qianqian; Yuan, Lu; Liou, Sy-Hwang.

In: IEEE Transactions on Magnetics, Vol. 49, No. 7, 6559313, 05.08.2013, p. 3890-3892.

Research output: Contribution to journalArticle

Yin, Xiaolu ; Jiao, Qianqian ; Yuan, Lu ; Liou, Sy-Hwang. / MEMS torsion oscillator magnetic field sensor. In: IEEE Transactions on Magnetics. 2013 ; Vol. 49, No. 7. pp. 3890-3892.
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