Mechanism and elimination of bending effect in femtosecond laser deep-hole drilling

Bo Xia, Lan Jiang, Xiaowei Li, Xueliang Yan, Yongfeng Lu

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

In this work, a comprehensive study of the bending effect, which remains one of the most critical challenges during deep-hole drilling, was conducted. The experimental statistics indicate that polarization is not the main factor in bending, but the deviation of the hole tends to be perpendicular to the polarization direction. Also, the dynamic ablated material/plasma was studied. Straight microholes were obtained by extending the interval between laser pulses to avoid dynamic ablated material existing in the millisecond time domain. Therefore, we speculated that the disturbance of the laser beam at the dynamic ablated aerosol, which have not sufficiently dispersed in the millisecond domain, is the main mechanism of bending. However, to more efficiently reduce the disturbance factor, a rough vacuum environment was applied; and the bending effect was also eliminated. The critical pressure for eliminating bending was about 2 × 104 Pa that is about one order of magnitude lower than the atmosphere. The fabricated high-quality microhole arrays without bending show that the proposed drilling method is convenient and efficient with high repeatability and controllability.

Original languageEnglish (US)
Pages (from-to)27853-27864
Number of pages12
JournalOptics Express
Volume23
Issue number21
DOIs
StatePublished - Oct 19 2015

Fingerprint

drilling
elimination
lasers
disturbances
critical pressure
controllability
polarization
aerosols
statistics
laser beams
intervals
deviation
atmospheres
vacuum
pulses

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Mechanism and elimination of bending effect in femtosecond laser deep-hole drilling. / Xia, Bo; Jiang, Lan; Li, Xiaowei; Yan, Xueliang; Lu, Yongfeng.

In: Optics Express, Vol. 23, No. 21, 19.10.2015, p. 27853-27864.

Research output: Contribution to journalArticle

Xia, Bo ; Jiang, Lan ; Li, Xiaowei ; Yan, Xueliang ; Lu, Yongfeng. / Mechanism and elimination of bending effect in femtosecond laser deep-hole drilling. In: Optics Express. 2015 ; Vol. 23, No. 21. pp. 27853-27864.
@article{cbc19aea9c1844819ed475b5c4533d97,
title = "Mechanism and elimination of bending effect in femtosecond laser deep-hole drilling",
abstract = "In this work, a comprehensive study of the bending effect, which remains one of the most critical challenges during deep-hole drilling, was conducted. The experimental statistics indicate that polarization is not the main factor in bending, but the deviation of the hole tends to be perpendicular to the polarization direction. Also, the dynamic ablated material/plasma was studied. Straight microholes were obtained by extending the interval between laser pulses to avoid dynamic ablated material existing in the millisecond time domain. Therefore, we speculated that the disturbance of the laser beam at the dynamic ablated aerosol, which have not sufficiently dispersed in the millisecond domain, is the main mechanism of bending. However, to more efficiently reduce the disturbance factor, a rough vacuum environment was applied; and the bending effect was also eliminated. The critical pressure for eliminating bending was about 2 × 104 Pa that is about one order of magnitude lower than the atmosphere. The fabricated high-quality microhole arrays without bending show that the proposed drilling method is convenient and efficient with high repeatability and controllability.",
author = "Bo Xia and Lan Jiang and Xiaowei Li and Xueliang Yan and Yongfeng Lu",
year = "2015",
month = "10",
day = "19",
doi = "10.1364/OE.23.027853",
language = "English (US)",
volume = "23",
pages = "27853--27864",
journal = "Optics Express",
issn = "1094-4087",
publisher = "The Optical Society",
number = "21",

}

TY - JOUR

T1 - Mechanism and elimination of bending effect in femtosecond laser deep-hole drilling

AU - Xia, Bo

AU - Jiang, Lan

AU - Li, Xiaowei

AU - Yan, Xueliang

AU - Lu, Yongfeng

PY - 2015/10/19

Y1 - 2015/10/19

N2 - In this work, a comprehensive study of the bending effect, which remains one of the most critical challenges during deep-hole drilling, was conducted. The experimental statistics indicate that polarization is not the main factor in bending, but the deviation of the hole tends to be perpendicular to the polarization direction. Also, the dynamic ablated material/plasma was studied. Straight microholes were obtained by extending the interval between laser pulses to avoid dynamic ablated material existing in the millisecond time domain. Therefore, we speculated that the disturbance of the laser beam at the dynamic ablated aerosol, which have not sufficiently dispersed in the millisecond domain, is the main mechanism of bending. However, to more efficiently reduce the disturbance factor, a rough vacuum environment was applied; and the bending effect was also eliminated. The critical pressure for eliminating bending was about 2 × 104 Pa that is about one order of magnitude lower than the atmosphere. The fabricated high-quality microhole arrays without bending show that the proposed drilling method is convenient and efficient with high repeatability and controllability.

AB - In this work, a comprehensive study of the bending effect, which remains one of the most critical challenges during deep-hole drilling, was conducted. The experimental statistics indicate that polarization is not the main factor in bending, but the deviation of the hole tends to be perpendicular to the polarization direction. Also, the dynamic ablated material/plasma was studied. Straight microholes were obtained by extending the interval between laser pulses to avoid dynamic ablated material existing in the millisecond time domain. Therefore, we speculated that the disturbance of the laser beam at the dynamic ablated aerosol, which have not sufficiently dispersed in the millisecond domain, is the main mechanism of bending. However, to more efficiently reduce the disturbance factor, a rough vacuum environment was applied; and the bending effect was also eliminated. The critical pressure for eliminating bending was about 2 × 104 Pa that is about one order of magnitude lower than the atmosphere. The fabricated high-quality microhole arrays without bending show that the proposed drilling method is convenient and efficient with high repeatability and controllability.

UR - http://www.scopus.com/inward/record.url?scp=84955310216&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84955310216&partnerID=8YFLogxK

U2 - 10.1364/OE.23.027853

DO - 10.1364/OE.23.027853

M3 - Article

C2 - 26480445

AN - SCOPUS:84955310216

VL - 23

SP - 27853

EP - 27864

JO - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 21

ER -