Mass density and hydrogen concentration in "diamond-like" carbon films: Proton recoil, Rutherford backscattering and ellipsometric analysis

David C. Ingram, John A. Woollam, George Bu-Abbud

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

We used helium-induced hydrogen recoil analysis to determine the concentration of hydrogen versus the anneal temperature in r.f. plasma-deposited "diamond-like" carbon films. In addition, Rutherford backscattering combined with spectroscopic ellipsometry was used to determine simply, accurately and non-destructively the mass density of the films. By comparing with "standard" samples, the hydrogen concentration is found to be as high as 47 at.% depending on the deposition conditions. The hydrogen concentration drops rapidly with anneal temperatures up to 960°C. The densities of three films prepared by r.f. plasma deposition were (1.7-1.8) × 103 kg m-3. This value is in good agreement with values found by conventional techniques. It is likely that hydrogen plays a major role in determining microstructure, bonding and density.

Original languageEnglish (US)
Pages (from-to)225-230
Number of pages6
JournalThin Solid Films
Volume137
Issue number2
DOIs
StatePublished - Mar 15 1986

Fingerprint

recoil protons
Diamond like carbon films
Rutherford backscattering spectroscopy
Protons
Hydrogen
backscattering
diamonds
carbon
hydrogen
Plasma deposition
Helium
Spectroscopic ellipsometry
ellipsometry
helium
Plasmas
Temperature
microstructure
Microstructure
temperature

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Mass density and hydrogen concentration in "diamond-like" carbon films : Proton recoil, Rutherford backscattering and ellipsometric analysis. / Ingram, David C.; Woollam, John A.; Bu-Abbud, George.

In: Thin Solid Films, Vol. 137, No. 2, 15.03.1986, p. 225-230.

Research output: Contribution to journalArticle

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