Mass density and hydrogen concentration in "diamond-like" carbon films: Proton recoil, Rutherford backscattering and ellipsometric analysis

David C. Ingram, John A. Woollam, George Bu-Abbud

Research output: Contribution to journalArticle

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Abstract

We used helium-induced hydrogen recoil analysis to determine the concentration of hydrogen versus the anneal temperature in r.f. plasma-deposited "diamond-like" carbon films. In addition, Rutherford backscattering combined with spectroscopic ellipsometry was used to determine simply, accurately and non-destructively the mass density of the films. By comparing with "standard" samples, the hydrogen concentration is found to be as high as 47 at.% depending on the deposition conditions. The hydrogen concentration drops rapidly with anneal temperatures up to 960°C. The densities of three films prepared by r.f. plasma deposition were (1.7-1.8) × 103 kg m-3. This value is in good agreement with values found by conventional techniques. It is likely that hydrogen plays a major role in determining microstructure, bonding and density.

Original languageEnglish (US)
Pages (from-to)225-230
Number of pages6
JournalThin Solid Films
Volume137
Issue number2
DOIs
Publication statusPublished - Mar 15 1986

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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