Low temperature ordering of FePt films by in-situ heating deposition plus post deposition annealing

Y. S. Yu, Hai Bo Li, W. L. Li, Mei Liu, Yu Mei Zhang, W. D. Fei, David J Sellmyer

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

FePt thin films with 40 nm thickness were prepared on thermally oxidized Si (001) substrates by dc magnetron sputtering at the nominal growth temperature 375 °C. The effects of annealing on microstructure and magnetic properties of FePt thin films were investigated. The as-deposited FePt thin films show soft magnetic properties. After the as-deposited FePt thin films were annealed at various temperatures and furnace cooled, it is found that the ordering temperature of L10 FePt phase could be reduced to 350 °C. For FePt thin films annealed at 350 °C, the in-plane and out-of-plane coercivities of the films increased to 510 and 543 kA/m, respectively, and the films had hard magnetic properties. A highly (001) orientation was obtained, when FePt thin films were annealed at 600 °C. And the hysteresis loops of FePt thin films annealed at 600 °C show out-of-plane magnetic anisotropy.

Original languageEnglish (US)
Pages (from-to)2171-2174
Number of pages4
JournalThin Solid Films
Volume518
Issue number8
DOIs
StatePublished - Feb 1 2010

Fingerprint

Annealing
Heating
Thin films
annealing
heating
thin films
Magnetic properties
Temperature
magnetic properties
Magnetic anisotropy
Growth temperature
Hysteresis loops
Coercive force
Magnetron sputtering
coercivity
furnaces
temperature
magnetron sputtering
Furnaces
hysteresis

Keywords

  • Annealing
  • Coercivity
  • FePt
  • Low temperature ordering
  • Magnetic films
  • Sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Low temperature ordering of FePt films by in-situ heating deposition plus post deposition annealing. / Yu, Y. S.; Li, Hai Bo; Li, W. L.; Liu, Mei; Zhang, Yu Mei; Fei, W. D.; Sellmyer, David J.

In: Thin Solid Films, Vol. 518, No. 8, 01.02.2010, p. 2171-2174.

Research output: Contribution to journalArticle

Yu, Y. S. ; Li, Hai Bo ; Li, W. L. ; Liu, Mei ; Zhang, Yu Mei ; Fei, W. D. ; Sellmyer, David J. / Low temperature ordering of FePt films by in-situ heating deposition plus post deposition annealing. In: Thin Solid Films. 2010 ; Vol. 518, No. 8. pp. 2171-2174.
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