Loss measurements for β-SiC-on insulator waveguides for high-speed silicon-based photonic devices

Adrian Vonsovici, Graham T. Reed, Alan G R Evans, Fereydoon Namavar

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

In this work planar planar β-SiC-on-insulator waveguides were investigated. The waveguides were fabricated by two different methods. In the first a technological process similar to that of SIMOX was used, and therefore a buried SiO2 layer was formed by high energy ion implantation of oxygen in SiC/Si wafers. For the second type of waveguides we used heteroepitaxy of SiC on SOI(SIMOX). The losses have been measured at 0.633, 1.3 and 1.55μm in both TE and TM polarization. A detailed analysis of the different loss mechanisms is presented. These types of waveguides have potential for high-speed silicon-based photonic devices compatible with silicon technology.

Original languageEnglish (US)
Pages (from-to)115-124
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3630
StatePublished - Jan 1 1999
EventProceedings of the 1999 Silicon-based Optoelectronics - San Jose, CA, USA
Duration: Jan 27 1999Jan 28 1999

Fingerprint

Photonic devices
Insulator
Silicon
Photonics
Waveguide
Waveguides
High Speed
high speed
insulators
photonics
waveguides
silicon
Ion Implantation
SiO2
SOI (semiconductors)
Epitaxial growth
Ion implantation
Wafer
High Energy
ion implantation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Loss measurements for β-SiC-on insulator waveguides for high-speed silicon-based photonic devices. / Vonsovici, Adrian; Reed, Graham T.; Evans, Alan G R; Namavar, Fereydoon.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3630, 01.01.1999, p. 115-124.

Research output: Contribution to journalConference article

Vonsovici, Adrian ; Reed, Graham T. ; Evans, Alan G R ; Namavar, Fereydoon. / Loss measurements for β-SiC-on insulator waveguides for high-speed silicon-based photonic devices. In: Proceedings of SPIE - The International Society for Optical Engineering. 1999 ; Vol. 3630. pp. 115-124.
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