Laser surface cleaning and its applications in data storage and microelectronics industries

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Laser cleaning as a new cleaning technique has emerged in order to effectively remove contaminants from solid surfaces. Two types of laser cleaning techniques have been developed recently, relying on pulsed laser heating of the surface without or with the presence of a thin liquid coating. Laser cleaning was demonstrated both theoretically and experimentally to be an effective cleaning technique for removing contaminants from solid surfaces without damage. For dry laser cleaning, two cleaning models were established for removal of particles from substrate surfaces from the viewpoint of energy and force. For steam laser cleaning, a cleaning model was established for removal of particles from substrate surfaces with a thin liquid layer by taking Van der Waals force, capillary force, cleaning force, and chemical bonding into account. The surface cleanliness can be monitored in real time by acoustic, electric and optical means. Applications of laser cleaning to clean magnetic slider surface, magnetic media surface, silicon wafer and IC mold surface will also be addressed. Engineering efforts and technical barriers of laser cleaning will be discussed in detail.

Original languageEnglish (US)
Title of host publicationICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
StatePublished - Dec 1 2003
EventICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics - Jacksonville, FL, United States
Duration: Oct 13 2003Oct 16 2003

Publication series

NameICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CityJacksonville, FL
Period10/13/0310/16/03

Fingerprint

Surface cleaning
Microelectronics
Cleaning
laser
Data storage equipment
Lasers
industry
Industry
chemical bonding
microelectronics
substrate
liquid
pollutant
Impurities
Laser heating
Van der Waals forces
silicon
coating
Steam
Liquids

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

Cite this

Lu, Y. F. (2003). Laser surface cleaning and its applications in data storage and microelectronics industries. In ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings [M407] (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Laser surface cleaning and its applications in data storage and microelectronics industries. / Lu, Y. F.

ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2003. M407 (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lu, YF 2003, Laser surface cleaning and its applications in data storage and microelectronics industries. in ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings., M407, ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings, ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Jacksonville, FL, United States, 10/13/03.
Lu YF. Laser surface cleaning and its applications in data storage and microelectronics industries. In ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2003. M407. (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
Lu, Y. F. / Laser surface cleaning and its applications in data storage and microelectronics industries. ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2003. (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
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