Laser nanomachining and nanoprocessing - Frontiers beyond the optical diffraction limit

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Laser material processing demonstrated its significance in many areas such as microelectronics, data storage, photonics and nanotechnology, since versatile laser sources provide flexible and unique energy source for precise control of material processing. With current laser technology, a short wavelength down to X-ray range and a short pulse duration down to femtosecond range can be achieved. The extreme conditions created by laser irradiation have provided strong impact on material research. To achieve nanoscale laser material machining and processing, we need to overcome the diffraction limit of the laser wavelengths. Recently, different approaches have been explored to overcome the diffraction limit and to achieve feature sizes down to 10 nm order, way beyond the diffraction limits. This paper will provide an overview in the areas of laser-based nanoscale machining and processing, including the author's own research experience on laser-assisted scanning probe microscope, superfocusing by optical resonance in spherical particles, laser nanoimprinting, laser synthesis of quantum dots, laser annealing of ultrashow pn junctions, nanometer-order film thickness detection using rotational Raman spectroscopy, and laser cleaning of nanoparticles.

Original languageEnglish (US)
Title of host publicationICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
StatePublished - Dec 1 2004
EventICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics - San Francisco, CA, United States
Duration: Oct 4 2004Oct 7 2004

Publication series

NameICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CitySan Francisco, CA
Period10/4/0410/7/04

Fingerprint

diffraction
Diffraction
laser
Lasers
Machining
Processing
Laser materials processing
Quantum dot lasers
Wavelength
Laser beam effects
wavelength
Nanotechnology
Microelectronics
Photonics
nanotechnology
Film thickness
Raman spectroscopy
Cleaning
Microscopes
annealing

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

Cite this

Lu, Y. F. (2004). Laser nanomachining and nanoprocessing - Frontiers beyond the optical diffraction limit. In ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Laser nanomachining and nanoprocessing - Frontiers beyond the optical diffraction limit. / Lu, Y. F.

ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lu, YF 2004, Laser nanomachining and nanoprocessing - Frontiers beyond the optical diffraction limit. in ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings, ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, San Francisco, CA, United States, 10/4/04.
Lu YF. Laser nanomachining and nanoprocessing - Frontiers beyond the optical diffraction limit. In ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
Lu, Y. F. / Laser nanomachining and nanoprocessing - Frontiers beyond the optical diffraction limit. ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
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