Laser microfabrication of transparent hard materials and signal diagnostics

M. H. Hong, K. Sugioka, Yongfeng Lu, K. Midorikawa, T. C. Chong

Research output: Contribution to journalConference article

23 Citations (Scopus)

Abstract

Laser-induced-plasma-assisted ablation (LIPAA) for glass microfabrication is investigated. A short pulse laser is applied to ablate a glass substrate. With proper control of laser parameters, surface microprocessing of the glass can be achieved. The laser beam goes through the substrate first and then irradiates a target beneath. For laser fluences above ablation threshold of the target, the target plasma flies toward the substrate at a high speed. At a short target-to-substrate distance, there are strong interactions among the target plasma, incident laser beam and glass substrate at its backside surface to induce ablation of the glass. A ultrafast phototube and optical emission spectrum analyzer are applied to study the dynamic interaction. From the signal diagnostics and analyses, laser-induced glass microfabrication can be monitored in real time.

Original languageEnglish (US)
Pages (from-to)556-561
Number of pages6
JournalApplied Surface Science
Volume186
Issue number1-4
DOIs
StatePublished - Jan 28 2002
EventProceedings of the European Materials Research Society 2001 Symposium - Strasbourg, France
Duration: Jun 5 2001Jun 5 2001

Fingerprint

Microfabrication
Glass
Lasers
glass
Ablation
ablation
lasers
Substrates
Plasmas
Laser beams
Phototubes
laser beams
phototubes
Spectrum analyzers
Beam plasma interactions
light emission
optical spectrum
Laser pulses
analyzers
fluence

Keywords

  • Glass microfabrication
  • Laser-induced-plasma-assisted ablation
  • Signal diagnostics

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Laser microfabrication of transparent hard materials and signal diagnostics. / Hong, M. H.; Sugioka, K.; Lu, Yongfeng; Midorikawa, K.; Chong, T. C.

In: Applied Surface Science, Vol. 186, No. 1-4, 28.01.2002, p. 556-561.

Research output: Contribution to journalConference article

Hong, M. H. ; Sugioka, K. ; Lu, Yongfeng ; Midorikawa, K. ; Chong, T. C. / Laser microfabrication of transparent hard materials and signal diagnostics. In: Applied Surface Science. 2002 ; Vol. 186, No. 1-4. pp. 556-561.
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