Laser-induced-plasma-assisted ablation for glass microfabrication

M. H. Hong, K. Sugioka, D. J. Wu, L. L. Wong, Y. F. Lu, K. Midorikawa, T. C. Chong

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Glass is a hard transparent material with many applications in Photonics and advanced display industries. It is a high challenge to achieve crack-free glass microfabrication due to its special material characteristics. Laser-induced-plasma-assisted ablation is applied in this study to get the high quality glass microfabrication. In this processing, the laser beam goes through the glass substrate first and then irradiates on a solid target behind. For laser fluence above ablation threshold for the target, the generated plasma flies forward at a high speed. At a small target-to-substrate distance, there are strong interactions among laser light, target plasma and glass materials at the rear side of the substrate. Light absorption characteristic at the glass substrate is modified since the plasma may soften and dope into the glass in the interaction area. To have a better understanding of this processing, signal diagnostics are carried out to study the dynamic interaction. It is found that glass microfabrication is closely related to laser fluence, target-to-substrate distance, laser spot size and laser beam scanning speed. With proper control of the processing parameters, glass surface marking, patterning and cutting can be achieved. With different materials as the targets, color marking of glass substrate can be obtained.

Original languageEnglish (US)
Pages (from-to)138-146
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4595
DOIs
StatePublished - Jan 1 2001

Fingerprint

Microfabrication
Ablation
ablation
Plasma
Laser
Plasmas
Glass
Lasers
glass
lasers
Substrate
Target
Substrates
Laser Beam
marking
Laser beams
fluence
Interaction
laser beams
transparence

Keywords

  • Glass microfabrication
  • Laser-induced-plasma-assisted ablation
  • Signal diagnostics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Laser-induced-plasma-assisted ablation for glass microfabrication. / Hong, M. H.; Sugioka, K.; Wu, D. J.; Wong, L. L.; Lu, Y. F.; Midorikawa, K.; Chong, T. C.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4595, 01.01.2001, p. 138-146.

Research output: Contribution to journalArticle

Hong, M. H. ; Sugioka, K. ; Wu, D. J. ; Wong, L. L. ; Lu, Y. F. ; Midorikawa, K. ; Chong, T. C. / Laser-induced-plasma-assisted ablation for glass microfabrication. In: Proceedings of SPIE - The International Society for Optical Engineering. 2001 ; Vol. 4595. pp. 138-146.
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