Laser direct writing of graphene patterns

J. B. Park, W. Xiong, Z. Q. Xie, M. Mitchell, Y. Gao, M. Qian, Yongfeng Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Rapid growth of single-layer graphene using laser-induced chemical vapor deposition (LCVD) with a visible CW laser (λ = 532 nm) irradiation at room temperature was investigated. In this study, an optically-pumped solid-state laser with a wavelength of 532 nm irradiates a thin nickel foil to induce a local temperature rise, thereby allowing the direct writing of graphene patterns about ∼10 μm in width with high growth rate on precisely controlled positions. It is demonstrated that the fabrication of graphene patterns can be achieved with a single scan for each graphene pattern using LCVD with no annealing or preprocessing of the substrate. The scan speed reaches to about ∼50 um/s, which indicates that the graphene pattern with 1:1 aspect ratio (x:y) can be grown in 0.2 sec. The patterned graphene on nickel was transferred to SiO 2/Si substrate for fabrication of electrical circuits and sensor devices.

Original languageEnglish (US)
Title of host publicationLaser-Material Interactions at Micro/Nanoscales
Pages69-74
Number of pages6
DOIs
StatePublished - Jan 1 2012
Event2011 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 25 2011Apr 29 2011

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1365
ISSN (Print)0272-9172

Conference

Conference2011 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/25/114/29/11

Fingerprint

Graphite
Graphene
graphene
Lasers
lasers
Nickel
Chemical vapor deposition
vapor deposition
nickel
Fabrication
fabrication
Continuous wave lasers
Solid state lasers
Substrates
preprocessing
solid state lasers
Metal foil
aspect ratio
Aspect ratio
foils

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Park, J. B., Xiong, W., Xie, Z. Q., Mitchell, M., Gao, Y., Qian, M., & Lu, Y. (2012). Laser direct writing of graphene patterns. In Laser-Material Interactions at Micro/Nanoscales (pp. 69-74). (Materials Research Society Symposium Proceedings; Vol. 1365). https://doi.org/10.1557/opl.2011.889

Laser direct writing of graphene patterns. / Park, J. B.; Xiong, W.; Xie, Z. Q.; Mitchell, M.; Gao, Y.; Qian, M.; Lu, Yongfeng.

Laser-Material Interactions at Micro/Nanoscales. 2012. p. 69-74 (Materials Research Society Symposium Proceedings; Vol. 1365).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, JB, Xiong, W, Xie, ZQ, Mitchell, M, Gao, Y, Qian, M & Lu, Y 2012, Laser direct writing of graphene patterns. in Laser-Material Interactions at Micro/Nanoscales. Materials Research Society Symposium Proceedings, vol. 1365, pp. 69-74, 2011 MRS Spring Meeting, San Francisco, CA, United States, 4/25/11. https://doi.org/10.1557/opl.2011.889
Park JB, Xiong W, Xie ZQ, Mitchell M, Gao Y, Qian M et al. Laser direct writing of graphene patterns. In Laser-Material Interactions at Micro/Nanoscales. 2012. p. 69-74. (Materials Research Society Symposium Proceedings). https://doi.org/10.1557/opl.2011.889
Park, J. B. ; Xiong, W. ; Xie, Z. Q. ; Mitchell, M. ; Gao, Y. ; Qian, M. ; Lu, Yongfeng. / Laser direct writing of graphene patterns. Laser-Material Interactions at Micro/Nanoscales. 2012. pp. 69-74 (Materials Research Society Symposium Proceedings).
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