Laser cleaning technology and its application

W. D. Song, M. H. Hong, L. Zhang, Y. F. Lu, T. C. Chong

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

Dry and steam laser cleaning was demonstrated to be an efficient cleaning tool for removing particles and film-type contaminants from solid surfaces. The application of laser cleaning technology in semiconductor and disk drive industry was also discussed. It was demonstrated that the cleaning efficiency for steam laser cleaning was higher than for dry laser cleaning.

Original languageEnglish (US)
Pages (from-to)280-283
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4426
DOIs
StatePublished - Jan 1 2002
Externally publishedYes
EventSecond International Symposium on Laser Precision Microfabrication - Singapore, Singapore
Duration: May 16 2001May 18 2001

Fingerprint

Cleaning
cleaning
Laser
Lasers
lasers
Steam
steam
solid surfaces
contaminants
Semiconductors
industries
Industry
Impurities
Semiconductor materials

Keywords

  • Applications
  • Cleaning mechanisms
  • Film-type contaminants
  • Laser cleaning
  • Particles

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Laser cleaning technology and its application. / Song, W. D.; Hong, M. H.; Zhang, L.; Lu, Y. F.; Chong, T. C.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4426, 01.01.2002, p. 280-283.

Research output: Contribution to journalConference article

Song, W. D. ; Hong, M. H. ; Zhang, L. ; Lu, Y. F. ; Chong, T. C. / Laser cleaning technology and its application. In: Proceedings of SPIE - The International Society for Optical Engineering. 2002 ; Vol. 4426. pp. 280-283.
@article{d31393e4e49e496f85d71cda01f2ce30,
title = "Laser cleaning technology and its application",
abstract = "Dry and steam laser cleaning was demonstrated to be an efficient cleaning tool for removing particles and film-type contaminants from solid surfaces. The application of laser cleaning technology in semiconductor and disk drive industry was also discussed. It was demonstrated that the cleaning efficiency for steam laser cleaning was higher than for dry laser cleaning.",
keywords = "Applications, Cleaning mechanisms, Film-type contaminants, Laser cleaning, Particles",
author = "Song, {W. D.} and Hong, {M. H.} and L. Zhang and Lu, {Y. F.} and Chong, {T. C.}",
year = "2002",
month = "1",
day = "1",
doi = "10.1117/12.456839",
language = "English (US)",
volume = "4426",
pages = "280--283",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",

}

TY - JOUR

T1 - Laser cleaning technology and its application

AU - Song, W. D.

AU - Hong, M. H.

AU - Zhang, L.

AU - Lu, Y. F.

AU - Chong, T. C.

PY - 2002/1/1

Y1 - 2002/1/1

N2 - Dry and steam laser cleaning was demonstrated to be an efficient cleaning tool for removing particles and film-type contaminants from solid surfaces. The application of laser cleaning technology in semiconductor and disk drive industry was also discussed. It was demonstrated that the cleaning efficiency for steam laser cleaning was higher than for dry laser cleaning.

AB - Dry and steam laser cleaning was demonstrated to be an efficient cleaning tool for removing particles and film-type contaminants from solid surfaces. The application of laser cleaning technology in semiconductor and disk drive industry was also discussed. It was demonstrated that the cleaning efficiency for steam laser cleaning was higher than for dry laser cleaning.

KW - Applications

KW - Cleaning mechanisms

KW - Film-type contaminants

KW - Laser cleaning

KW - Particles

UR - http://www.scopus.com/inward/record.url?scp=0036384607&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036384607&partnerID=8YFLogxK

U2 - 10.1117/12.456839

DO - 10.1117/12.456839

M3 - Conference article

AN - SCOPUS:0036384607

VL - 4426

SP - 280

EP - 283

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

ER -