Laser cleaning of IC mould and its real-time monitoring

Yongfeng Lu, Wen Dong Song, Ming Hui Hong, Zhong Min Ren, Qiong Chen, Tow Chong Chong

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Laser-induced removal of organic contaminants on IC mould surfaces was studied both experimentally and theoretically. The mould surfaces before and after cleaning were observed under an optical microscope and analyzed by Auger electron spectroscopy (AES). It was found that the contaminants in the irradiated area were effectively removed by pulsed laser irradiation at a laser fluence greater than the cleaning threshold of 100 mJ/cm2. The cleaning efficiency increases with increasing laser fluence and the damage threshold of the mould surfaces is about 1.05 J/cm2, which is in good agreement with the theoretical damage threshold. We also demonstrated that the acoustic wave detection in real-time can be used to both monitor the surface cleanness during the laser cleaning process and determine the cleaning threshold and cleaning efficiency.

Original languageEnglish (US)
Pages (from-to)4811-4813
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number8
StatePublished - Aug 1 2000

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cleaning
Cleaning
Lasers
Monitoring
lasers
yield point
contaminants
fluence
Impurities
thresholds
Laser beam effects
Auger electron spectroscopy
optical microscopes
Pulsed lasers
Auger spectroscopy
electron spectroscopy
pulsed lasers
Microscopes
Acoustic waves
irradiation

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Laser cleaning of IC mould and its real-time monitoring. / Lu, Yongfeng; Song, Wen Dong; Hong, Ming Hui; Ren, Zhong Min; Chen, Qiong; Chong, Tow Chong.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 39, No. 8, 01.08.2000, p. 4811-4813.

Research output: Contribution to journalArticle

Lu, Yongfeng ; Song, Wen Dong ; Hong, Ming Hui ; Ren, Zhong Min ; Chen, Qiong ; Chong, Tow Chong. / Laser cleaning of IC mould and its real-time monitoring. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2000 ; Vol. 39, No. 8. pp. 4811-4813.
@article{b7c916f21b224499a367f3ba92d30986,
title = "Laser cleaning of IC mould and its real-time monitoring",
abstract = "Laser-induced removal of organic contaminants on IC mould surfaces was studied both experimentally and theoretically. The mould surfaces before and after cleaning were observed under an optical microscope and analyzed by Auger electron spectroscopy (AES). It was found that the contaminants in the irradiated area were effectively removed by pulsed laser irradiation at a laser fluence greater than the cleaning threshold of 100 mJ/cm2. The cleaning efficiency increases with increasing laser fluence and the damage threshold of the mould surfaces is about 1.05 J/cm2, which is in good agreement with the theoretical damage threshold. We also demonstrated that the acoustic wave detection in real-time can be used to both monitor the surface cleanness during the laser cleaning process and determine the cleaning threshold and cleaning efficiency.",
author = "Yongfeng Lu and Song, {Wen Dong} and Hong, {Ming Hui} and Ren, {Zhong Min} and Qiong Chen and Chong, {Tow Chong}",
year = "2000",
month = "8",
day = "1",
language = "English (US)",
volume = "39",
pages = "4811--4813",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Japan Society of Applied Physics",
number = "8",

}

TY - JOUR

T1 - Laser cleaning of IC mould and its real-time monitoring

AU - Lu, Yongfeng

AU - Song, Wen Dong

AU - Hong, Ming Hui

AU - Ren, Zhong Min

AU - Chen, Qiong

AU - Chong, Tow Chong

PY - 2000/8/1

Y1 - 2000/8/1

N2 - Laser-induced removal of organic contaminants on IC mould surfaces was studied both experimentally and theoretically. The mould surfaces before and after cleaning were observed under an optical microscope and analyzed by Auger electron spectroscopy (AES). It was found that the contaminants in the irradiated area were effectively removed by pulsed laser irradiation at a laser fluence greater than the cleaning threshold of 100 mJ/cm2. The cleaning efficiency increases with increasing laser fluence and the damage threshold of the mould surfaces is about 1.05 J/cm2, which is in good agreement with the theoretical damage threshold. We also demonstrated that the acoustic wave detection in real-time can be used to both monitor the surface cleanness during the laser cleaning process and determine the cleaning threshold and cleaning efficiency.

AB - Laser-induced removal of organic contaminants on IC mould surfaces was studied both experimentally and theoretically. The mould surfaces before and after cleaning were observed under an optical microscope and analyzed by Auger electron spectroscopy (AES). It was found that the contaminants in the irradiated area were effectively removed by pulsed laser irradiation at a laser fluence greater than the cleaning threshold of 100 mJ/cm2. The cleaning efficiency increases with increasing laser fluence and the damage threshold of the mould surfaces is about 1.05 J/cm2, which is in good agreement with the theoretical damage threshold. We also demonstrated that the acoustic wave detection in real-time can be used to both monitor the surface cleanness during the laser cleaning process and determine the cleaning threshold and cleaning efficiency.

UR - http://www.scopus.com/inward/record.url?scp=0034245232&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034245232&partnerID=8YFLogxK

M3 - Article

VL - 39

SP - 4811

EP - 4813

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 8

ER -