Laser-based micro/nanofabrication in one, two and three dimensions

Wei Xiong, Yunshen Zhou, Wenjia Hou, Lijia Jiang, Masoud Mahjouri-Samani, Jongbok Park, Xiangnan He, Yang Gao, Lisha Fan, Tommaso Baldacchini, Jean Francois Silvain, Yongfeng Lu

Research output: Contribution to journalReview article

17 Citations (Scopus)

Abstract

Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, room-temperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laser-based micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.

Original languageEnglish (US)
Pages (from-to)351-378
Number of pages28
JournalFrontiers of Optoelectronics
Volume8
Issue number4
DOIs
StatePublished - Dec 1 2015

Fingerprint

Nanotechnology
Lasers
Fabrication
Carbon Nanotubes
Graphite
Nanostructures
Nanostructured materials
Graphene
Carbon nanotubes
Functional materials
Chemical vapor deposition
Photons
NEMS
Nanoscience
Nanophotonics
Nanoelectronics
Ablation
Polymerization
Processing

Keywords

  • carbon nanotubes (CNTs)
  • graphene
  • laser material interaction
  • micro/nanofabrication
  • multi-photon ablation (MPA)
  • two-photon polymerization (TPP)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Xiong, W., Zhou, Y., Hou, W., Jiang, L., Mahjouri-Samani, M., Park, J., ... Lu, Y. (2015). Laser-based micro/nanofabrication in one, two and three dimensions. Frontiers of Optoelectronics, 8(4), 351-378. https://doi.org/10.1007/s12200-015-0481-3

Laser-based micro/nanofabrication in one, two and three dimensions. / Xiong, Wei; Zhou, Yunshen; Hou, Wenjia; Jiang, Lijia; Mahjouri-Samani, Masoud; Park, Jongbok; He, Xiangnan; Gao, Yang; Fan, Lisha; Baldacchini, Tommaso; Silvain, Jean Francois; Lu, Yongfeng.

In: Frontiers of Optoelectronics, Vol. 8, No. 4, 01.12.2015, p. 351-378.

Research output: Contribution to journalReview article

Xiong, W, Zhou, Y, Hou, W, Jiang, L, Mahjouri-Samani, M, Park, J, He, X, Gao, Y, Fan, L, Baldacchini, T, Silvain, JF & Lu, Y 2015, 'Laser-based micro/nanofabrication in one, two and three dimensions', Frontiers of Optoelectronics, vol. 8, no. 4, pp. 351-378. https://doi.org/10.1007/s12200-015-0481-3
Xiong W, Zhou Y, Hou W, Jiang L, Mahjouri-Samani M, Park J et al. Laser-based micro/nanofabrication in one, two and three dimensions. Frontiers of Optoelectronics. 2015 Dec 1;8(4):351-378. https://doi.org/10.1007/s12200-015-0481-3
Xiong, Wei ; Zhou, Yunshen ; Hou, Wenjia ; Jiang, Lijia ; Mahjouri-Samani, Masoud ; Park, Jongbok ; He, Xiangnan ; Gao, Yang ; Fan, Lisha ; Baldacchini, Tommaso ; Silvain, Jean Francois ; Lu, Yongfeng. / Laser-based micro/nanofabrication in one, two and three dimensions. In: Frontiers of Optoelectronics. 2015 ; Vol. 8, No. 4. pp. 351-378.
@article{1140554351dd44d5b51ad7d1be08f6ee,
title = "Laser-based micro/nanofabrication in one, two and three dimensions",
abstract = "Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, room-temperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laser-based micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.",
keywords = "carbon nanotubes (CNTs), graphene, laser material interaction, micro/nanofabrication, multi-photon ablation (MPA), two-photon polymerization (TPP)",
author = "Wei Xiong and Yunshen Zhou and Wenjia Hou and Lijia Jiang and Masoud Mahjouri-Samani and Jongbok Park and Xiangnan He and Yang Gao and Lisha Fan and Tommaso Baldacchini and Silvain, {Jean Francois} and Yongfeng Lu",
year = "2015",
month = "12",
day = "1",
doi = "10.1007/s12200-015-0481-3",
language = "English (US)",
volume = "8",
pages = "351--378",
journal = "Frontiers of Optoelectronics",
issn = "2095-2759",
publisher = "Springer Science + Business Media",
number = "4",

}

TY - JOUR

T1 - Laser-based micro/nanofabrication in one, two and three dimensions

AU - Xiong, Wei

AU - Zhou, Yunshen

AU - Hou, Wenjia

AU - Jiang, Lijia

AU - Mahjouri-Samani, Masoud

AU - Park, Jongbok

AU - He, Xiangnan

AU - Gao, Yang

AU - Fan, Lisha

AU - Baldacchini, Tommaso

AU - Silvain, Jean Francois

AU - Lu, Yongfeng

PY - 2015/12/1

Y1 - 2015/12/1

N2 - Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, room-temperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laser-based micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.

AB - Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, room-temperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laser-based micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.

KW - carbon nanotubes (CNTs)

KW - graphene

KW - laser material interaction

KW - micro/nanofabrication

KW - multi-photon ablation (MPA)

KW - two-photon polymerization (TPP)

UR - http://www.scopus.com/inward/record.url?scp=84949228474&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84949228474&partnerID=8YFLogxK

U2 - 10.1007/s12200-015-0481-3

DO - 10.1007/s12200-015-0481-3

M3 - Review article

AN - SCOPUS:84949228474

VL - 8

SP - 351

EP - 378

JO - Frontiers of Optoelectronics

JF - Frontiers of Optoelectronics

SN - 2095-2759

IS - 4

ER -