Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid

Y. X. Han, H. Ling, Y. F. Lu, M. J. O'Keefe, T. McKindra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. The deposition process was performed with a peak laser power density of about 10 8 W/cm 2 in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. A mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
Publication statusPublished - May 1 2006
EventLaser-based Micropackaging - San Jose, CA, United States
Duration: Jan 25 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6107
ISSN (Print)0277-786X

Conference

ConferenceLaser-based Micropackaging
CountryUnited States
CitySan Jose, CA
Period1/25/061/26/06

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Keywords

  • Cyclohexane
  • Diamond-like carbon
  • OES
  • Raman
  • SEM
  • XPS

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Han, Y. X., Ling, H., Lu, Y. F., O'Keefe, M. J., & McKindra, T. (2006). Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid. In Proceedings of SPIE - The International Society for Optical Engineering [61070P] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6107). https://doi.org/10.1117/12.644984