Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid

Y. X. Han, H. Ling, Yongfeng Lu, M. J. O'Keefe, T. McKindra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Diamond-like carbon (DLC) films were synthesized by KrF excimer laser irradiation of single-crystal Si substrates immersed in a cyclohexane liquid. The deposition process was performed with a peak laser power density of about 10 8 W/cm 2 in open atmosphere at room temperature. Scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) studies showed diamond-like characteristics of the deposited films. Optical emission spectroscopy (OES) of laser-induced plasmas of cyclohexane indicated decomposition of the cyclohexane molecules. A mechanism based on the dissociation of the cyclohexane molecules and condensation of energetic carbon atoms into diamond-like films was proposed to explain the process.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
StatePublished - May 1 2006
EventLaser-based Micropackaging - San Jose, CA, United States
Duration: Jan 25 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6107
ISSN (Print)0277-786X

Conference

ConferenceLaser-based Micropackaging
CountryUnited States
CitySan Jose, CA
Period1/25/061/26/06

Fingerprint

Cyclohexane
cyclohexane
Diamonds
diamonds
Carbon
Lasers
carbon
Liquids
synthesis
liquids
lasers
Diamond like carbon films
Optical emission spectroscopy
Molecules
optical emission spectroscopy
Excimer lasers
Laser beam effects
diamond films
excimer lasers
Raman spectroscopy

Keywords

  • Cyclohexane
  • Diamond-like carbon
  • OES
  • Raman
  • SEM
  • XPS

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Han, Y. X., Ling, H., Lu, Y., O'Keefe, M. J., & McKindra, T. (2006). Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid. In Proceedings of SPIE - The International Society for Optical Engineering [61070P] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6107). https://doi.org/10.1117/12.644984

Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid. / Han, Y. X.; Ling, H.; Lu, Yongfeng; O'Keefe, M. J.; McKindra, T.

Proceedings of SPIE - The International Society for Optical Engineering. 2006. 61070P (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6107).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Han, YX, Ling, H, Lu, Y, O'Keefe, MJ & McKindra, T 2006, Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid. in Proceedings of SPIE - The International Society for Optical Engineering., 61070P, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6107, Laser-based Micropackaging, San Jose, CA, United States, 1/25/06. https://doi.org/10.1117/12.644984
Han YX, Ling H, Lu Y, O'Keefe MJ, McKindra T. Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid. In Proceedings of SPIE - The International Society for Optical Engineering. 2006. 61070P. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.644984
Han, Y. X. ; Ling, H. ; Lu, Yongfeng ; O'Keefe, M. J. ; McKindra, T. / Laser-assisted synthesis of diamond-like carbon from cyclohexane liquid. Proceedings of SPIE - The International Society for Optical Engineering. 2006. (Proceedings of SPIE - The International Society for Optical Engineering).
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