Laser-assisted nanoimprinting of self-assembled single size and binary-size nanoparticles on silicon and aluminum substrates

L. P. Li, Yongfeng Lu, D. W. Doerr, Dennis R Alexander

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A monolayer of self-assembled silica particles can be imprinted into a silicon (Si) substrate by laser irradiation (KrF excimer laser, λ=248 nm). Periodical hemispherical cavities can be therefore created on the substrate surface. The influences of various particle sizes and laser fluence were investigated. In addition, preheating of the substrate significantly improves the performance. One-dimensional thermal calculation was employed to understand the thermal effects in this process. Three-dimensional optical simulation provided an accurate insight into the light intensity enhancement. Raman spectroscopy was used to examine the stress induced by the laser imprinting process resided in the cavity structures. Self-assembly of binary-size nanoparticles was achieved and its application on the fabrication of binary-size nanocavity arrays by laser-assisted nanoimprinting was investigated.

Original languageEnglish (US)
Title of host publicationICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
StatePublished - Dec 1 2004
EventICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics - San Francisco, CA, United States
Duration: Oct 4 2004Oct 7 2004

Publication series

NameICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CitySan Francisco, CA
Period10/4/0410/7/04

Fingerprint

Silicon
Aluminum
silicon
aluminum
laser
Nanoparticles
substrate
Lasers
Substrates
Preheating
Excimer lasers
Laser beam effects
cavity
Silicon Dioxide
Thermal effects
Self assembly
Raman spectroscopy
Monolayers
Particle size
Silica

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

Cite this

Li, L. P., Lu, Y., Doerr, D. W., & Alexander, D. R. (2004). Laser-assisted nanoimprinting of self-assembled single size and binary-size nanoparticles on silicon and aluminum substrates. In ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Laser-assisted nanoimprinting of self-assembled single size and binary-size nanoparticles on silicon and aluminum substrates. / Li, L. P.; Lu, Yongfeng; Doerr, D. W.; Alexander, Dennis R.

ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Li, LP, Lu, Y, Doerr, DW & Alexander, DR 2004, Laser-assisted nanoimprinting of self-assembled single size and binary-size nanoparticles on silicon and aluminum substrates. in ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings, ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, San Francisco, CA, United States, 10/4/04.
Li LP, Lu Y, Doerr DW, Alexander DR. Laser-assisted nanoimprinting of self-assembled single size and binary-size nanoparticles on silicon and aluminum substrates. In ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
Li, L. P. ; Lu, Yongfeng ; Doerr, D. W. ; Alexander, Dennis R. / Laser-assisted nanoimprinting of self-assembled single size and binary-size nanoparticles on silicon and aluminum substrates. ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings. 2004. (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).
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