Laser-assisted imprinting of self-assembled nanostructures

H. Wang, Y. F. Lu, Z. Y. Yang

Research output: Contribution to conferencePaper

Abstract

Nanoscale structuring is a promising area in which the various processing methods are being developed. Based on the advantages of laser processing, associated with improved self-assembly technique, it is very effective to fabricate nanoscale structures, such as 3-D photonic bandgap structures, especially on the materials with high hardness and high melting point. This new approach to fabricating 3-D photonic bandgap structures on silicon will be presented. Self-assembly technique was used to deposit multi-layer of silica microparticles with a size of 0.81 μm. A pulsed KrF excimer laser (23 ns, 248 nm) was applied as the imprinting energy source.

Original languageEnglish (US)
StatePublished - Nov 28 2006
EventInternational Conference on Manufacturing Science and Engineering, MSEC 2006 - Ypsilanti, MI, United States
Duration: Oct 8 2006Oct 11 2006

Conference

ConferenceInternational Conference on Manufacturing Science and Engineering, MSEC 2006
CountryUnited States
CityYpsilanti, MI
Period10/8/0610/11/06

Fingerprint

Photonics
Self assembly
Nanostructures
Energy gap
Lasers
Excimer lasers
Processing
Pulsed lasers
Melting point
Deposits
Hardness
Silica
Silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Wang, H., Lu, Y. F., & Yang, Z. Y. (2006). Laser-assisted imprinting of self-assembled nanostructures. Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States.

Laser-assisted imprinting of self-assembled nanostructures. / Wang, H.; Lu, Y. F.; Yang, Z. Y.

2006. Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States.

Research output: Contribution to conferencePaper

Wang, H, Lu, YF & Yang, ZY 2006, 'Laser-assisted imprinting of self-assembled nanostructures' Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States, 10/8/06 - 10/11/06, .
Wang H, Lu YF, Yang ZY. Laser-assisted imprinting of self-assembled nanostructures. 2006. Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States.
Wang, H. ; Lu, Y. F. ; Yang, Z. Y. / Laser-assisted imprinting of self-assembled nanostructures. Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States.
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