Laser-assisted chemical vapor deposition of silicon nano-layers in air-hole microstructure fibers

Di Xu, Tong Chen, Kevin Chen, Hao Wang, Yongfeng Lu, Yuankun Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a laser-assisted chemical vapor deposition of silicon thin film and silicon thin film longperiod gratings inside a two-hole fiber and photonic crystal fiber with hollow cores.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2010
StatePublished - Dec 1 2010
EventConference on Lasers and Electro-Optics, CLEO 2010 - San Jose, CA, United States
Duration: May 16 2010May 21 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceConference on Lasers and Electro-Optics, CLEO 2010
CountryUnited States
CitySan Jose, CA
Period5/16/105/21/10

Fingerprint

Chemical vapor deposition
vapor deposition
Thin films
Silicon
microstructure
Microstructure
fibers
Photonic crystal fibers
Fibers
Lasers
air
silicon
thin films
Air
lasers
hollow
gratings
photonics
crystals

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Xu, D., Chen, T., Chen, K., Wang, H., Lu, Y., & Lin, Y. (2010). Laser-assisted chemical vapor deposition of silicon nano-layers in air-hole microstructure fibers. In Conference on Lasers and Electro-Optics, CLEO 2010 (Optics InfoBase Conference Papers).

Laser-assisted chemical vapor deposition of silicon nano-layers in air-hole microstructure fibers. / Xu, Di; Chen, Tong; Chen, Kevin; Wang, Hao; Lu, Yongfeng; Lin, Yuankun.

Conference on Lasers and Electro-Optics, CLEO 2010. 2010. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Xu, D, Chen, T, Chen, K, Wang, H, Lu, Y & Lin, Y 2010, Laser-assisted chemical vapor deposition of silicon nano-layers in air-hole microstructure fibers. in Conference on Lasers and Electro-Optics, CLEO 2010. Optics InfoBase Conference Papers, Conference on Lasers and Electro-Optics, CLEO 2010, San Jose, CA, United States, 5/16/10.
Xu D, Chen T, Chen K, Wang H, Lu Y, Lin Y. Laser-assisted chemical vapor deposition of silicon nano-layers in air-hole microstructure fibers. In Conference on Lasers and Electro-Optics, CLEO 2010. 2010. (Optics InfoBase Conference Papers).
Xu, Di ; Chen, Tong ; Chen, Kevin ; Wang, Hao ; Lu, Yongfeng ; Lin, Yuankun. / Laser-assisted chemical vapor deposition of silicon nano-layers in air-hole microstructure fibers. Conference on Lasers and Electro-Optics, CLEO 2010. 2010. (Optics InfoBase Conference Papers).
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