Ion beam smoothing of metallic mirrors

David C. Ingram, Antony W. McCormick, Peter P. Pronko, John A. Woollam, Paul G. Snyder, David B. Poker

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The implantation of 150 keV molybdenum ions into molybdenum mirrors and 400 keV silver or copper ions into copper mirrors is found to increase the reflectivity of these mirrors. Analysis of ellipsometric data from these samples using the Bruggeman effective medium approximation demonstrates that the change is due to smoothing of the surface. The improvement reaches a maximum as a function of fluence and then declines as the surface is roughened through sputter-induced topography. The smoothing effect appears to be dependent on elastic energy deposition in the vicinity of the surface. However, if the energy density at the surface is too high, such as with 1 MeV gold ions, then spike effects appears to roughen the surface before significant smoothing can take place. Rotating the samples in the ion beam does not affect the initial smoothing, or its decline, but delays the development of the visible roughening.

Original languageEnglish (US)
Pages (from-to)417-421
Number of pages5
JournalMaterials Science and Engineering
Volume90
Issue numberC
DOIs
StatePublished - Jun 1987

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Ion beams
Molybdenum
Ions
Copper
Ion implantation
Topography
Silver
Gold

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ingram, D. C., McCormick, A. W., Pronko, P. P., Woollam, J. A., Snyder, P. G., & Poker, D. B. (1987). Ion beam smoothing of metallic mirrors. Materials Science and Engineering, 90(C), 417-421. https://doi.org/10.1016/0025-5416(87)90239-4

Ion beam smoothing of metallic mirrors. / Ingram, David C.; McCormick, Antony W.; Pronko, Peter P.; Woollam, John A.; Snyder, Paul G.; Poker, David B.

In: Materials Science and Engineering, Vol. 90, No. C, 06.1987, p. 417-421.

Research output: Contribution to journalArticle

Ingram, DC, McCormick, AW, Pronko, PP, Woollam, JA, Snyder, PG & Poker, DB 1987, 'Ion beam smoothing of metallic mirrors', Materials Science and Engineering, vol. 90, no. C, pp. 417-421. https://doi.org/10.1016/0025-5416(87)90239-4
Ingram DC, McCormick AW, Pronko PP, Woollam JA, Snyder PG, Poker DB. Ion beam smoothing of metallic mirrors. Materials Science and Engineering. 1987 Jun;90(C):417-421. https://doi.org/10.1016/0025-5416(87)90239-4
Ingram, David C. ; McCormick, Antony W. ; Pronko, Peter P. ; Woollam, John A. ; Snyder, Paul G. ; Poker, David B. / Ion beam smoothing of metallic mirrors. In: Materials Science and Engineering. 1987 ; Vol. 90, No. C. pp. 417-421.
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