Ion-beam-induced chemical mixing at a nanocrystalline CeO2-Si interface

Philip D. Edmondson, Neil P. Young, Chad M. Parish, Sandra Moll, Fereydoon Namavar, William J. Weber, Yanwen Zhang

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Thin films of nanocrystalline ceria deposited onto a silicon substrate have been irradiated with 3 MeV Au+ ions to a total dose of 34 displacements per atom to examine the film/substrate interfacial response upon displacement damage. Under irradiation, a band of contrast is observed to form that grows under further irradiation. Scanning and high-resolution transmission electron microscopy imaging and analysis suggest that this band of contrast is a cerium silicate phase with an approximate Ce:Si:O composition ratio of 1:1:3 in an amorphous nature. The slightly nonstoichiometric composition arises due to the loss of mobile oxygen within the cerium silicate phase under the current irradiation condition. This nonequilibrium phase is formed as a direct result of ion-beam-induced chemical mixing caused by ballistic collisions between the incoming ion and the lattice atoms. This may hold promise in ion beam engineering of cerium silicates for microelectronic applications e.g., the fabrication of blue LEDs.

Original languageEnglish (US)
Pages (from-to)1666-1672
Number of pages7
JournalJournal of the American Ceramic Society
Volume96
Issue number5
DOIs
StatePublished - May 1 2013

Fingerprint

Cerium
Silicates
Ion beams
Irradiation
Ions
Atoms
Cerium compounds
Silicon
Substrates
Ballistics
High resolution transmission electron microscopy
Chemical analysis
Microelectronics
Light emitting diodes
Oxygen
Scanning
Imaging techniques
Fabrication
Thin films

ASJC Scopus subject areas

  • Ceramics and Composites
  • Geology
  • Geochemistry and Petrology
  • Materials Chemistry

Cite this

Edmondson, P. D., Young, N. P., Parish, C. M., Moll, S., Namavar, F., Weber, W. J., & Zhang, Y. (2013). Ion-beam-induced chemical mixing at a nanocrystalline CeO2-Si interface. Journal of the American Ceramic Society, 96(5), 1666-1672. https://doi.org/10.1111/jace.12214

Ion-beam-induced chemical mixing at a nanocrystalline CeO2-Si interface. / Edmondson, Philip D.; Young, Neil P.; Parish, Chad M.; Moll, Sandra; Namavar, Fereydoon; Weber, William J.; Zhang, Yanwen.

In: Journal of the American Ceramic Society, Vol. 96, No. 5, 01.05.2013, p. 1666-1672.

Research output: Contribution to journalArticle

Edmondson, PD, Young, NP, Parish, CM, Moll, S, Namavar, F, Weber, WJ & Zhang, Y 2013, 'Ion-beam-induced chemical mixing at a nanocrystalline CeO2-Si interface', Journal of the American Ceramic Society, vol. 96, no. 5, pp. 1666-1672. https://doi.org/10.1111/jace.12214
Edmondson PD, Young NP, Parish CM, Moll S, Namavar F, Weber WJ et al. Ion-beam-induced chemical mixing at a nanocrystalline CeO2-Si interface. Journal of the American Ceramic Society. 2013 May 1;96(5):1666-1672. https://doi.org/10.1111/jace.12214
Edmondson, Philip D. ; Young, Neil P. ; Parish, Chad M. ; Moll, Sandra ; Namavar, Fereydoon ; Weber, William J. ; Zhang, Yanwen. / Ion-beam-induced chemical mixing at a nanocrystalline CeO2-Si interface. In: Journal of the American Ceramic Society. 2013 ; Vol. 96, No. 5. pp. 1666-1672.
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