Investigation of nanoscale electro machining (nano-EM) in dielectric oil

Ajay P. Malshe, K. Virwani, K. P. Rajurkar, D. Deshpande

Research output: Contribution to journalArticle

36 Citations (Scopus)

Abstract

There is a great need to produce nanoscale features on diverse and sometimes difficult-to-machine materials for electronic and bio-medical applications. This paper describes an electro machining (EM) process at nanoscale, implemented using a scanning probe platinum-iridium (Pt-Ir) electrode tool (15-20 nm radius) in dielectric oil. The experiments were conducted by maintaining a gap of 2 nm between the tool and the workpiece. These experiments have successfully demonstrated that controlled and consistent machined features, as small as 10 nm in diameter, on atomically flat gold can be obtained. It is suggested that resonant tunnelling through dielectric oil molecules causes the removal of material.

Original languageEnglish (US)
Pages (from-to)175-178
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume54
Issue number1
DOIs
StatePublished - Jan 1 2005

Fingerprint

Machining
Resonant tunneling
Iridium
Medical applications
Platinum
Gold
Experiments
Scanning
Electrodes
Molecules
Oils

Keywords

  • Electrical discharge machining
  • Nanoscale
  • Scanning tunneling microscope

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Investigation of nanoscale electro machining (nano-EM) in dielectric oil. / Malshe, Ajay P.; Virwani, K.; Rajurkar, K. P.; Deshpande, D.

In: CIRP Annals - Manufacturing Technology, Vol. 54, No. 1, 01.01.2005, p. 175-178.

Research output: Contribution to journalArticle

Malshe, Ajay P. ; Virwani, K. ; Rajurkar, K. P. ; Deshpande, D. / Investigation of nanoscale electro machining (nano-EM) in dielectric oil. In: CIRP Annals - Manufacturing Technology. 2005 ; Vol. 54, No. 1. pp. 175-178.
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