Investigation of femtosecond laser-assisted micromachining of lithium niobate

A. Malshe, D. Deshpande, E. Stach, K. Rajurkar, D. Alexander

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.

Original languageEnglish (US)
Pages (from-to)187-190
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume53
Issue number1
DOIs
StatePublished - Jan 1 2004

Fingerprint

Micromachining
Ultrashort pulses
Lithium
Machining
Electronic equipment
Lighting
Transmission electron microscopy
Crystals
Oxygen
Communication
Chemical analysis
Industry

Keywords

  • Laser micro machining
  • Single crystal
  • Surface

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

Investigation of femtosecond laser-assisted micromachining of lithium niobate. / Malshe, A.; Deshpande, D.; Stach, E.; Rajurkar, K.; Alexander, D.

In: CIRP Annals - Manufacturing Technology, Vol. 53, No. 1, 01.01.2004, p. 187-190.

Research output: Contribution to journalArticle

@article{f784ba3aa2064a15959cfcd86650fcde,
title = "Investigation of femtosecond laser-assisted micromachining of lithium niobate",
abstract = "Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.",
keywords = "Laser micro machining, Single crystal, Surface",
author = "A. Malshe and D. Deshpande and E. Stach and K. Rajurkar and D. Alexander",
year = "2004",
month = "1",
day = "1",
doi = "10.1016/S0007-8506(07)60675-1",
language = "English (US)",
volume = "53",
pages = "187--190",
journal = "CIRP Annals - Manufacturing Technology",
issn = "0007-8506",
publisher = "Elsevier USA",
number = "1",

}

TY - JOUR

T1 - Investigation of femtosecond laser-assisted micromachining of lithium niobate

AU - Malshe, A.

AU - Deshpande, D.

AU - Stach, E.

AU - Rajurkar, K.

AU - Alexander, D.

PY - 2004/1/1

Y1 - 2004/1/1

N2 - Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.

AB - Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.

KW - Laser micro machining

KW - Single crystal

KW - Surface

UR - http://www.scopus.com/inward/record.url?scp=3142694861&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=3142694861&partnerID=8YFLogxK

U2 - 10.1016/S0007-8506(07)60675-1

DO - 10.1016/S0007-8506(07)60675-1

M3 - Article

AN - SCOPUS:3142694861

VL - 53

SP - 187

EP - 190

JO - CIRP Annals - Manufacturing Technology

JF - CIRP Annals - Manufacturing Technology

SN - 0007-8506

IS - 1

ER -