Interactions between pulsed laser-induced plasma and ECR microwave plasma

Junyi Tang, Jian Sun, Hao Wang, Jie Shao, Hao Ling, Xiaokang Shen, Jiada Wu, Yongfeng Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Pulsed-laser deposition (PLD) is a versatile technique for thin film deposition. The generation and propagation of laserinduced plasmas have been extensively studied. Other plasma sources have been combined with PLD to improve the film qualities. The knowledge about the interactions between the laser-induced plasmas and additional plasmas and their effects on film growth is still limited. We have investigated the optical emission spectra from the interaction region of low-pressure ECR microwave plasmas and pulsed-laser-induced plasmas. In this region, the spatial and temporal distributions of the laser-ablated species were altered while very few collisions were expected in the ambient gas due to the low pressure. The results were compared with those with laser ablation or ECR microwave discharge along. The mechanisms and effects of the interactions were discussed.

Original languageEnglish (US)
Title of host publicationLaser-based Micro- and Nanopackaging and Assembly II
DOIs
Publication statusPublished - Mar 31 2008
EventLaser-based Micro- and Nanopackaging and Assembly II - San Jose, CA, United States
Duration: Jan 22 2008Jan 24 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6880
ISSN (Print)0277-786X

Conference

ConferenceLaser-based Micro- and Nanopackaging and Assembly II
CountryUnited States
CitySan Jose, CA
Period1/22/081/24/08

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Keywords

  • ECR microwave plasma
  • Optical emission spectroscopy
  • Pulsed laser ablation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Tang, J., Sun, J., Wang, H., Shao, J., Ling, H., Shen, X., ... Lu, Y. (2008). Interactions between pulsed laser-induced plasma and ECR microwave plasma. In Laser-based Micro- and Nanopackaging and Assembly II [68800M] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6880). https://doi.org/10.1117/12.762277