Instrumentation: Ellipsometry

J. N. Hilfiker, J. A. Woollam

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish (US)
Title of host publicationEncyclopedia of Modern Optics, Five-Volume Set
PublisherElsevier Inc.
Pages297-307
Number of pages11
ISBN (Print)9780123693952
DOIs
StatePublished - Jan 1 2004

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Ellipsometry

ASJC Scopus subject areas

  • Computer Science(all)

Cite this

Hilfiker, J. N., & Woollam, J. A. (2004). Instrumentation: Ellipsometry. In Encyclopedia of Modern Optics, Five-Volume Set (pp. 297-307). Elsevier Inc.. https://doi.org/10.1016/B0-12-369395-0/00833-2

Instrumentation : Ellipsometry. / Hilfiker, J. N.; Woollam, J. A.

Encyclopedia of Modern Optics, Five-Volume Set. Elsevier Inc., 2004. p. 297-307.

Research output: Chapter in Book/Report/Conference proceedingChapter

Hilfiker, JN & Woollam, JA 2004, Instrumentation: Ellipsometry. in Encyclopedia of Modern Optics, Five-Volume Set. Elsevier Inc., pp. 297-307. https://doi.org/10.1016/B0-12-369395-0/00833-2
Hilfiker JN, Woollam JA. Instrumentation: Ellipsometry. In Encyclopedia of Modern Optics, Five-Volume Set. Elsevier Inc. 2004. p. 297-307 https://doi.org/10.1016/B0-12-369395-0/00833-2
Hilfiker, J. N. ; Woollam, J. A. / Instrumentation : Ellipsometry. Encyclopedia of Modern Optics, Five-Volume Set. Elsevier Inc., 2004. pp. 297-307
@inbook{887073932cca42f8ba10d207c2ec078e,
title = "Instrumentation: Ellipsometry",
author = "Hilfiker, {J. N.} and Woollam, {J. A.}",
year = "2004",
month = "1",
day = "1",
doi = "10.1016/B0-12-369395-0/00833-2",
language = "English (US)",
isbn = "9780123693952",
pages = "297--307",
booktitle = "Encyclopedia of Modern Optics, Five-Volume Set",
publisher = "Elsevier Inc.",

}

TY - CHAP

T1 - Instrumentation

T2 - Ellipsometry

AU - Hilfiker, J. N.

AU - Woollam, J. A.

PY - 2004/1/1

Y1 - 2004/1/1

UR - http://www.scopus.com/inward/record.url?scp=85069308949&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85069308949&partnerID=8YFLogxK

U2 - 10.1016/B0-12-369395-0/00833-2

DO - 10.1016/B0-12-369395-0/00833-2

M3 - Chapter

AN - SCOPUS:85069308949

SN - 9780123693952

SP - 297

EP - 307

BT - Encyclopedia of Modern Optics, Five-Volume Set

PB - Elsevier Inc.

ER -