INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si.

F. Namavar, J. I. Budnick, A. Fasihuddin, H. C. Hayden, D. A. Pease, F. A. Otter, V. Patarini

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherNorth-Holland
Pages347-352
Number of pages6
ISBN (Print)0444008691
StatePublished - Jan 1 1984

Publication series

NameMaterials Research Society Symposia Proceedings
Volume27
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Namavar, F., Budnick, J. I., Fasihuddin, A., Hayden, H. C., Pease, D. A., Otter, F. A., & Patarini, V. (1984). INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si. In Materials Research Society Symposia Proceedings (pp. 347-352). (Materials Research Society Symposia Proceedings; Vol. 27). North-Holland.

INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si. / Namavar, F.; Budnick, J. I.; Fasihuddin, A.; Hayden, H. C.; Pease, D. A.; Otter, F. A.; Patarini, V.

Materials Research Society Symposia Proceedings. North-Holland, 1984. p. 347-352 (Materials Research Society Symposia Proceedings; Vol. 27).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Namavar, F, Budnick, JI, Fasihuddin, A, Hayden, HC, Pease, DA, Otter, FA & Patarini, V 1984, INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si. in Materials Research Society Symposia Proceedings. Materials Research Society Symposia Proceedings, vol. 27, North-Holland, pp. 347-352.
Namavar F, Budnick JI, Fasihuddin A, Hayden HC, Pease DA, Otter FA et al. INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si. In Materials Research Society Symposia Proceedings. North-Holland. 1984. p. 347-352. (Materials Research Society Symposia Proceedings).
Namavar, F. ; Budnick, J. I. ; Fasihuddin, A. ; Hayden, H. C. ; Pease, D. A. ; Otter, F. A. ; Patarini, V. / INFLUENCE OF IMPLANTATION CONDITIONS AND TARGET ORIENTATION IN HIGH DOSE IMPLANTATION OF Al** plus INTO Si. Materials Research Society Symposia Proceedings. North-Holland, 1984. pp. 347-352 (Materials Research Society Symposia Proceedings).
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