In Situ Ellipsometry in Microelectronics

E. A. Irene, John A Woollam

Research output: Contribution to journalArticle

18 Citations (Scopus)
Original languageEnglish (US)
Pages (from-to)24-28
Number of pages5
JournalMRS Bulletin
Volume20
Issue number5
DOIs
StatePublished - Jan 1 1995
Externally publishedYes

Fingerprint

Ellipsometry
microelectronics
Microelectronics
ellipsometry
Physical optics
physical optics
Thin films
Monitoring
Substrates
thin films

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this

In Situ Ellipsometry in Microelectronics. / Irene, E. A.; Woollam, John A.

In: MRS Bulletin, Vol. 20, No. 5, 01.01.1995, p. 24-28.

Research output: Contribution to journalArticle

Irene, E. A. ; Woollam, John A. / In Situ Ellipsometry in Microelectronics. In: MRS Bulletin. 1995 ; Vol. 20, No. 5. pp. 24-28.
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