Imaging of flexural and torsional resonance modes of atomic force microscopy cantilevers using optical interferometry

Michael Reinstaedtler, Ute Rabe, Volker Scherer, Joseph A. Turner, Walter Arnold

Research output: Contribution to journalConference article

40 Citations (Scopus)

Abstract

Commercial rectangular atomic force microscope cantilever beams made of silicon were set into vibration, using a piezoelectric ultrasonic transducer coupled to the chip of a cantilever. The transducer was excited with continuous rf in the frequency range of 100 kHz to 3 MHz. The vibrations were monitored using an optical Michelson heterodyne-interferometer allowing the surface of the cantilever under examination to be scanned with a lateral resolution of several μm. A number of free torsional and flexural vibration modes of the beams were imaged quantitatively. Comparison of the experimental resonance frequencies and the amplitude and phase distribution of the modes to theoretical models showed that asymmetries in the beam strongly influence the vibrational behavior of the beam. The consequences for quantitative local stiffness measurements are discussed.

Original languageEnglish (US)
Pages (from-to)1152-1158
Number of pages7
JournalSurface Science
Volume532-535
DOIs
StatePublished - Jun 10 2003
EventProceedings of the 7th International Conference on Nanometer - Malmo, Sweden
Duration: Aug 29 2002Aug 31 2002

Fingerprint

Ultrasonic transducers
Piezoelectric transducers
Cantilever beams
Silicon
Interferometry
Interferometers
Transducers
Atomic force microscopy
interferometry
Microscopes
Stiffness
atomic force microscopy
Imaging techniques
transducers
torsional vibration
vibration
cantilever beams
free vibration
Michelson interferometers
vibration mode

Keywords

  • Acoustic waves
  • Atomic force microscopy
  • Models of non-linear phenomena

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Imaging of flexural and torsional resonance modes of atomic force microscopy cantilevers using optical interferometry. / Reinstaedtler, Michael; Rabe, Ute; Scherer, Volker; Turner, Joseph A.; Arnold, Walter.

In: Surface Science, Vol. 532-535, 10.06.2003, p. 1152-1158.

Research output: Contribution to journalConference article

Reinstaedtler, Michael ; Rabe, Ute ; Scherer, Volker ; Turner, Joseph A. ; Arnold, Walter. / Imaging of flexural and torsional resonance modes of atomic force microscopy cantilevers using optical interferometry. In: Surface Science. 2003 ; Vol. 532-535. pp. 1152-1158.
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AB - Commercial rectangular atomic force microscope cantilever beams made of silicon were set into vibration, using a piezoelectric ultrasonic transducer coupled to the chip of a cantilever. The transducer was excited with continuous rf in the frequency range of 100 kHz to 3 MHz. The vibrations were monitored using an optical Michelson heterodyne-interferometer allowing the surface of the cantilever under examination to be scanned with a lateral resolution of several μm. A number of free torsional and flexural vibration modes of the beams were imaged quantitatively. Comparison of the experimental resonance frequencies and the amplitude and phase distribution of the modes to theoretical models showed that asymmetries in the beam strongly influence the vibrational behavior of the beam. The consequences for quantitative local stiffness measurements are discussed.

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