Hybrid laser processing for microfabrication of glass

K. Sugioka, K. Obata, M. H. Hong, D. J. Wu, L. L. Wong, Y. F. Lu, T. C. Chong, K. Midorikawa

Research output: Contribution to journalArticle

26 Scopus citations

Abstract

Hybrid laser processing for the precision microfabrication of glass materials in which the interaction of a conventional pulsed laser beam and a medium on the material surface leads to effective ablation and modification, is reviewed. A major role of the medium is to produce strong absorption of the conventional laser beam by the material. Simultaneous irradiation by a vacuum ultraviolet (VUV) laser beam that possesses an extremely small laser fluence and an ultraviolet (UV) laser greatly improves the ablation quality and modification efficiency for fused silica (VUV-UV multiwavelength excitation process). The metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials by the same laser beam, resulting in microstructuring, cutting, color marking, printing, and selective metallization of glass materials (laser-induced plasma-assisted ablation (LIPAA)). The detailed discussion presented here includes the ablation mechanism of hybrid laser processing.

Original languageEnglish (US)
Pages (from-to)251-257
Number of pages7
JournalApplied Physics A: Materials Science and Processing
Volume77
Issue number2
Publication statusPublished - Jul 1 2003

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ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

Cite this

Sugioka, K., Obata, K., Hong, M. H., Wu, D. J., Wong, L. L., Lu, Y. F., ... Midorikawa, K. (2003). Hybrid laser processing for microfabrication of glass. Applied Physics A: Materials Science and Processing, 77(2), 251-257.