High-resolution and fast-response fiber-optic temperature sensor using silicon Fabry-Pérot cavity

Guigen Liu, Ming Han, Weilin Hou

Research output: Contribution to journalArticle

81 Citations (Scopus)

Abstract

We report a fiber-optic sensor based on a silicon Fabry-Pérot cavity, fabricated by attaching a silicon pillar on the tip of a single-mode fiber, for high-resolution and high-speed temperature measurement. The large thermo-optic coefficient and thermal expansion coefficient of the silicon material give rise to an experimental sensitivity of 84.6 pm/°C. The excellent transparency and large refractive index of silicon over the infrared wavelength range result in a visibility of 33 dB for the reflection spectrum. A novel average wavelength tracking method has been proposed and demonstrated for sensor demodulation with improved signal-to-noise ratio, which leads to a temperature resolution of 6 × 10-4 °C. Due to the high thermal diffusivity of silicon, a response time as short as 0.51 ms for a sensor with an 80-μm-diameter and 200-μm-long silicon pillar has been experimentally achieved, suggesting a maximum frequency of ∼ 2 kHz can be reached, to address the needs for highly dynamic environmental variations such as those found in the ocean.

Original languageEnglish (US)
Pages (from-to)7237-7247
Number of pages11
JournalOptics Express
Volume23
Issue number6
DOIs
StatePublished - Mar 23 2015

Fingerprint

temperature sensors
fiber optics
cavities
high resolution
silicon
sensors
demodulation
coefficients
thermal diffusivity
visibility
wavelengths
temperature measurement
thermal expansion
oceans
signal to noise ratios
high speed
optics
refractivity
expansion
fibers

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

High-resolution and fast-response fiber-optic temperature sensor using silicon Fabry-Pérot cavity. / Liu, Guigen; Han, Ming; Hou, Weilin.

In: Optics Express, Vol. 23, No. 6, 23.03.2015, p. 7237-7247.

Research output: Contribution to journalArticle

@article{88de496320664aeaacc4c23dc6395f35,
title = "High-resolution and fast-response fiber-optic temperature sensor using silicon Fabry-P{\'e}rot cavity",
abstract = "We report a fiber-optic sensor based on a silicon Fabry-P{\'e}rot cavity, fabricated by attaching a silicon pillar on the tip of a single-mode fiber, for high-resolution and high-speed temperature measurement. The large thermo-optic coefficient and thermal expansion coefficient of the silicon material give rise to an experimental sensitivity of 84.6 pm/°C. The excellent transparency and large refractive index of silicon over the infrared wavelength range result in a visibility of 33 dB for the reflection spectrum. A novel average wavelength tracking method has been proposed and demonstrated for sensor demodulation with improved signal-to-noise ratio, which leads to a temperature resolution of 6 × 10-4 °C. Due to the high thermal diffusivity of silicon, a response time as short as 0.51 ms for a sensor with an 80-μm-diameter and 200-μm-long silicon pillar has been experimentally achieved, suggesting a maximum frequency of ∼ 2 kHz can be reached, to address the needs for highly dynamic environmental variations such as those found in the ocean.",
author = "Guigen Liu and Ming Han and Weilin Hou",
year = "2015",
month = "3",
day = "23",
doi = "10.1364/OE.23.007237",
language = "English (US)",
volume = "23",
pages = "7237--7247",
journal = "Optics Express",
issn = "1094-4087",
publisher = "The Optical Society",
number = "6",

}

TY - JOUR

T1 - High-resolution and fast-response fiber-optic temperature sensor using silicon Fabry-Pérot cavity

AU - Liu, Guigen

AU - Han, Ming

AU - Hou, Weilin

PY - 2015/3/23

Y1 - 2015/3/23

N2 - We report a fiber-optic sensor based on a silicon Fabry-Pérot cavity, fabricated by attaching a silicon pillar on the tip of a single-mode fiber, for high-resolution and high-speed temperature measurement. The large thermo-optic coefficient and thermal expansion coefficient of the silicon material give rise to an experimental sensitivity of 84.6 pm/°C. The excellent transparency and large refractive index of silicon over the infrared wavelength range result in a visibility of 33 dB for the reflection spectrum. A novel average wavelength tracking method has been proposed and demonstrated for sensor demodulation with improved signal-to-noise ratio, which leads to a temperature resolution of 6 × 10-4 °C. Due to the high thermal diffusivity of silicon, a response time as short as 0.51 ms for a sensor with an 80-μm-diameter and 200-μm-long silicon pillar has been experimentally achieved, suggesting a maximum frequency of ∼ 2 kHz can be reached, to address the needs for highly dynamic environmental variations such as those found in the ocean.

AB - We report a fiber-optic sensor based on a silicon Fabry-Pérot cavity, fabricated by attaching a silicon pillar on the tip of a single-mode fiber, for high-resolution and high-speed temperature measurement. The large thermo-optic coefficient and thermal expansion coefficient of the silicon material give rise to an experimental sensitivity of 84.6 pm/°C. The excellent transparency and large refractive index of silicon over the infrared wavelength range result in a visibility of 33 dB for the reflection spectrum. A novel average wavelength tracking method has been proposed and demonstrated for sensor demodulation with improved signal-to-noise ratio, which leads to a temperature resolution of 6 × 10-4 °C. Due to the high thermal diffusivity of silicon, a response time as short as 0.51 ms for a sensor with an 80-μm-diameter and 200-μm-long silicon pillar has been experimentally achieved, suggesting a maximum frequency of ∼ 2 kHz can be reached, to address the needs for highly dynamic environmental variations such as those found in the ocean.

UR - http://www.scopus.com/inward/record.url?scp=84936858912&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84936858912&partnerID=8YFLogxK

U2 - 10.1364/OE.23.007237

DO - 10.1364/OE.23.007237

M3 - Article

C2 - 25837068

AN - SCOPUS:84936858912

VL - 23

SP - 7237

EP - 7247

JO - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 6

ER -