Abstract
A general model is derived for computing the heat flow induced by a scanning continuous-wave laser beam with a Gaussian intensity distribution in a semi-infinite substrate. Temperature-dependent thermal conductivity, thermal diffusivity, and surface reflectivity are incorporated in the model. The model is then applied to different substrate materials such as silicon, GaAs, and Mn-Zn ferrite. The numerical results show that the heat flow intensity in the substrate depends on the incident laser power, substrate temperature, scan speed, and beam radius. This study is expected to be useful in investigating the distributions of the laser-induced thermal stresses and lattice damages.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 3701-3712 |
| Number of pages | 12 |
| Journal | Journal of Applied Physics |
| Volume | 71 |
| Issue number | 8 |
| DOIs | |
| State | Published - Dec 1 1992 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
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Heat flow in substrates induced by a scanning laser beam. / Lu, Yongfeng.
In: Journal of Applied Physics, Vol. 71, No. 8, 01.12.1992, p. 3701-3712.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Heat flow in substrates induced by a scanning laser beam
AU - Lu, Yongfeng
PY - 1992/12/1
Y1 - 1992/12/1
N2 - A general model is derived for computing the heat flow induced by a scanning continuous-wave laser beam with a Gaussian intensity distribution in a semi-infinite substrate. Temperature-dependent thermal conductivity, thermal diffusivity, and surface reflectivity are incorporated in the model. The model is then applied to different substrate materials such as silicon, GaAs, and Mn-Zn ferrite. The numerical results show that the heat flow intensity in the substrate depends on the incident laser power, substrate temperature, scan speed, and beam radius. This study is expected to be useful in investigating the distributions of the laser-induced thermal stresses and lattice damages.
AB - A general model is derived for computing the heat flow induced by a scanning continuous-wave laser beam with a Gaussian intensity distribution in a semi-infinite substrate. Temperature-dependent thermal conductivity, thermal diffusivity, and surface reflectivity are incorporated in the model. The model is then applied to different substrate materials such as silicon, GaAs, and Mn-Zn ferrite. The numerical results show that the heat flow intensity in the substrate depends on the incident laser power, substrate temperature, scan speed, and beam radius. This study is expected to be useful in investigating the distributions of the laser-induced thermal stresses and lattice damages.
UR - http://www.scopus.com/inward/record.url?scp=0012715534&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0012715534&partnerID=8YFLogxK
U2 - 10.1063/1.350880
DO - 10.1063/1.350880
M3 - Article
VL - 71
SP - 3701
EP - 3712
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 8
ER -