Growth of ultrathin silver films by excimer-laser-induced decomposition of silver acetate in air

Yong Feng Lu, Mikio Takai, Takao Shiokawa, Yoshinobu Aoyagi

Research output: Contribution to journalArticle

10 Scopus citations


Excimer-laser-induced deposition of silver film from a silver acetate (CH3COOAg) has been investigated. Ultra- thin silver film with a thickness of nanometer order can be obtained by excimer-laser-induced decomposition of silver acetate in air. The decomposition reaction is photochemical. Smooth thin film without grains and other microstructures can be obtained by this process. Almost pure silver in the deposited thin film has been achieved. This method provides a way to grow silver thin film on different substrate materials such as Mn-Zn ferrite, glass and metals.

Original languageEnglish (US)
Pages (from-to)L1313-L1315
JournalJapanese Journal of Applied Physics
Issue number9
StatePublished - Sep 1994



  • Excimer laser
  • Laser deposition
  • Photodecomposition
  • Silver acetate
  • Silver thin film

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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